JPS5433097A - Semiconductor gas sensor - Google Patents

Semiconductor gas sensor

Info

Publication number
JPS5433097A
JPS5433097A JP9882677A JP9882677A JPS5433097A JP S5433097 A JPS5433097 A JP S5433097A JP 9882677 A JP9882677 A JP 9882677A JP 9882677 A JP9882677 A JP 9882677A JP S5433097 A JPS5433097 A JP S5433097A
Authority
JP
Japan
Prior art keywords
gas sensor
semiconductor gas
gas
transistor
disposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9882677A
Other languages
Japanese (ja)
Inventor
Koichi Oguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP9882677A priority Critical patent/JPS5433097A/en
Publication of JPS5433097A publication Critical patent/JPS5433097A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE: To make possible inexpensive supply of gas sensors of a small size and high reliability by disposing a gas detecting transistor and a reference transistor on the same substrate with a MOS type semiconductor gas sensor.
COPYRIGHT: (C)1979,JPO&Japio
JP9882677A 1977-08-18 1977-08-18 Semiconductor gas sensor Pending JPS5433097A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9882677A JPS5433097A (en) 1977-08-18 1977-08-18 Semiconductor gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9882677A JPS5433097A (en) 1977-08-18 1977-08-18 Semiconductor gas sensor

Publications (1)

Publication Number Publication Date
JPS5433097A true JPS5433097A (en) 1979-03-10

Family

ID=14230089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9882677A Pending JPS5433097A (en) 1977-08-18 1977-08-18 Semiconductor gas sensor

Country Status (1)

Country Link
JP (1) JPS5433097A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60233734A (en) * 1984-05-07 1985-11-20 Japanese National Railways<Jnr> Discordance detecting mrthod of synchronizing multiplex computer
JPS62242245A (en) * 1986-04-15 1987-10-22 Hitachi Ltd Data check device in data transfer path
JP2007519929A (en) * 2004-01-27 2007-07-19 エイチツースキャン コーポレイション Gas sensor with integrated reference element
JP2016085124A (en) * 2014-10-27 2016-05-19 日立Ｇｅニュークリア・エナジー株式会社 Gas sensor and gas sensor manufacturing method
JP2016194462A (en) * 2015-04-01 2016-11-17 日立オートモティブシステムズ株式会社 Sensor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60233734A (en) * 1984-05-07 1985-11-20 Japanese National Railways<Jnr> Discordance detecting mrthod of synchronizing multiplex computer
JPS62242245A (en) * 1986-04-15 1987-10-22 Hitachi Ltd Data check device in data transfer path
JP2007519929A (en) * 2004-01-27 2007-07-19 エイチツースキャン コーポレイション Gas sensor with integrated reference element
JP4870577B2 (en) * 2004-01-27 2012-02-08 エイチツースキャン コーポレイション Gas sensor with integrated reference element
JP2016085124A (en) * 2014-10-27 2016-05-19 日立Ｇｅニュークリア・エナジー株式会社 Gas sensor and gas sensor manufacturing method
JP2016194462A (en) * 2015-04-01 2016-11-17 日立オートモティブシステムズ株式会社 Sensor device

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