JPS5433954B2 - - Google Patents
Info
- Publication number
- JPS5433954B2 JPS5433954B2 JP9228276A JP9228276A JPS5433954B2 JP S5433954 B2 JPS5433954 B2 JP S5433954B2 JP 9228276 A JP9228276 A JP 9228276A JP 9228276 A JP9228276 A JP 9228276A JP S5433954 B2 JPS5433954 B2 JP S5433954B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9228276A JPS52155059A (en) | 1976-08-04 | 1976-08-04 | Device for high pressure oxidation diffusion for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9228276A JPS52155059A (en) | 1976-08-04 | 1976-08-04 | Device for high pressure oxidation diffusion for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52155059A JPS52155059A (en) | 1977-12-23 |
| JPS5433954B2 true JPS5433954B2 (it) | 1979-10-24 |
Family
ID=14050037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9228276A Granted JPS52155059A (en) | 1976-08-04 | 1976-08-04 | Device for high pressure oxidation diffusion for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52155059A (it) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6092827U (ja) * | 1983-11-30 | 1985-06-25 | 富士通株式会社 | 熱処理炉 |
| JPS6224630A (ja) * | 1985-07-24 | 1987-02-02 | Mitsubishi Electric Corp | 熱酸化膜形成方法及びその装置 |
| JP2688653B2 (ja) * | 1988-05-06 | 1997-12-10 | 東京エレクトロン株式会社 | 半導体加圧酸化方法 |
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1976
- 1976-08-04 JP JP9228276A patent/JPS52155059A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52155059A (en) | 1977-12-23 |