JPS543594A - Solid surface element analyzer - Google Patents

Solid surface element analyzer

Info

Publication number
JPS543594A
JPS543594A JP6789877A JP6789877A JPS543594A JP S543594 A JPS543594 A JP S543594A JP 6789877 A JP6789877 A JP 6789877A JP 6789877 A JP6789877 A JP 6789877A JP S543594 A JPS543594 A JP S543594A
Authority
JP
Japan
Prior art keywords
solid surface
surface element
element analyzer
analyzer
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6789877A
Other languages
Japanese (ja)
Inventor
Hiroshi Doi
Ichiro Shikamata
Kazunobu Hayakawa
Susumu Kawase
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6789877A priority Critical patent/JPS543594A/en
Publication of JPS543594A publication Critical patent/JPS543594A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enable surface analysis of specimen by charge beam radiation to be performed with high sensitivity by lowering the solid surface by a circulating type cooling system.
JP6789877A 1977-06-10 1977-06-10 Solid surface element analyzer Pending JPS543594A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6789877A JPS543594A (en) 1977-06-10 1977-06-10 Solid surface element analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6789877A JPS543594A (en) 1977-06-10 1977-06-10 Solid surface element analyzer

Publications (1)

Publication Number Publication Date
JPS543594A true JPS543594A (en) 1979-01-11

Family

ID=13358166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6789877A Pending JPS543594A (en) 1977-06-10 1977-06-10 Solid surface element analyzer

Country Status (1)

Country Link
JP (1) JPS543594A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759354U (en) * 1980-09-26 1982-04-08
WO2015041267A1 (en) * 2013-09-20 2015-03-26 株式会社日立ハイテクノロジーズ Anti-contamination trap, and vacuum application device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759354U (en) * 1980-09-26 1982-04-08
WO2015041267A1 (en) * 2013-09-20 2015-03-26 株式会社日立ハイテクノロジーズ Anti-contamination trap, and vacuum application device
JPWO2015041267A1 (en) * 2013-09-20 2017-03-02 株式会社日立ハイテクノロジーズ Anti-contamination trap and vacuum application equipment
US10269533B2 (en) 2013-09-20 2019-04-23 Hitachi High-Technologies Corporation Anti-contamination trap, and vacuum application device

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