JPS543593A - Solid surface analyzer - Google Patents

Solid surface analyzer

Info

Publication number
JPS543593A
JPS543593A JP6789777A JP6789777A JPS543593A JP S543593 A JPS543593 A JP S543593A JP 6789777 A JP6789777 A JP 6789777A JP 6789777 A JP6789777 A JP 6789777A JP S543593 A JPS543593 A JP S543593A
Authority
JP
Japan
Prior art keywords
solid surface
surface analyzer
radiation
insulators
semiconductors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6789777A
Other languages
Japanese (ja)
Inventor
Hiroshi Doi
Kazunobu Hayakawa
Susumu Kawase
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6789777A priority Critical patent/JPS543593A/en
Publication of JPS543593A publication Critical patent/JPS543593A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To prevent charging of specimen surface and enable surface analysis of insulators, semiconductors, metals, etc. to be performed with high sensitivity and high accuracy by performing light radiation in addition to ion beam or electron beam radiation.
JP6789777A 1977-06-10 1977-06-10 Solid surface analyzer Pending JPS543593A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6789777A JPS543593A (en) 1977-06-10 1977-06-10 Solid surface analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6789777A JPS543593A (en) 1977-06-10 1977-06-10 Solid surface analyzer

Publications (1)

Publication Number Publication Date
JPS543593A true JPS543593A (en) 1979-01-11

Family

ID=13358137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6789777A Pending JPS543593A (en) 1977-06-10 1977-06-10 Solid surface analyzer

Country Status (1)

Country Link
JP (1) JPS543593A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165717A (en) * 1984-02-08 1985-08-28 Agency Of Ind Science & Technol Ion implantation
JPS60260832A (en) * 1984-06-08 1985-12-24 Nippon Telegr & Teleph Corp <Ntt> Auger electron spectrochemical analysis method of insulator
JPH11102654A (en) * 1997-09-26 1999-04-13 Nec Corp Method and device for elementary analysis
JP2023154072A (en) * 2015-02-10 2023-10-18 ノヴァ メジャリング インスツルメンツ インコーポレイテッド Systems and methods for semiconductor measurement and surface analysis using secondary ion mass spectrometry

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60165717A (en) * 1984-02-08 1985-08-28 Agency Of Ind Science & Technol Ion implantation
JPS60260832A (en) * 1984-06-08 1985-12-24 Nippon Telegr & Teleph Corp <Ntt> Auger electron spectrochemical analysis method of insulator
JPH11102654A (en) * 1997-09-26 1999-04-13 Nec Corp Method and device for elementary analysis
JP2023154072A (en) * 2015-02-10 2023-10-18 ノヴァ メジャリング インスツルメンツ インコーポレイテッド Systems and methods for semiconductor measurement and surface analysis using secondary ion mass spectrometry

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