JPS5437471A - Code reading device for wafer - Google Patents

Code reading device for wafer

Info

Publication number
JPS5437471A
JPS5437471A JP10332677A JP10332677A JPS5437471A JP S5437471 A JPS5437471 A JP S5437471A JP 10332677 A JP10332677 A JP 10332677A JP 10332677 A JP10332677 A JP 10332677A JP S5437471 A JPS5437471 A JP S5437471A
Authority
JP
Japan
Prior art keywords
wafer
reading device
code reading
code
codes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10332677A
Other languages
English (en)
Inventor
Masakazu Yokoyama
Mitsusada Shibasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10332677A priority Critical patent/JPS5437471A/ja
Publication of JPS5437471A publication Critical patent/JPS5437471A/ja
Pending legal-status Critical Current

Links

JP10332677A 1977-08-29 1977-08-29 Code reading device for wafer Pending JPS5437471A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10332677A JPS5437471A (en) 1977-08-29 1977-08-29 Code reading device for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10332677A JPS5437471A (en) 1977-08-29 1977-08-29 Code reading device for wafer

Publications (1)

Publication Number Publication Date
JPS5437471A true JPS5437471A (en) 1979-03-19

Family

ID=14351047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10332677A Pending JPS5437471A (en) 1977-08-29 1977-08-29 Code reading device for wafer

Country Status (1)

Country Link
JP (1) JPS5437471A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739247U (ja) * 1980-08-14 1982-03-02
JPH01170013A (ja) * 1987-12-25 1989-07-05 Teru Kyushu Kk 被処理体の処理方法及び処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5739247U (ja) * 1980-08-14 1982-03-02
JPH01170013A (ja) * 1987-12-25 1989-07-05 Teru Kyushu Kk 被処理体の処理方法及び処理装置

Similar Documents

Publication Publication Date Title
JPS5380105A (en) Digital signal transmission method
JPS5323522A (en) Bar code reading method and its device
JPS51140488A (en) Mask alignment device
JPS5686306A (en) Signal processing circuit for distance measuring device
JPS5437471A (en) Code reading device for wafer
JPS5296827A (en) Code reading circuit
JPS5433097A (en) Semiconductor gas sensor
JPS53112675A (en) Discriminator for waveform
JPS5238980A (en) Temperature detection device
JPS52110079A (en) Photoelectric conversion unit
JPS545623A (en) Code reading device
JPS5344098A (en) Detecting apparatus of upper and lower limit
JPS5374837A (en) Bar code reading device
JPS5353266A (en) Probe card
JPS548908A (en) Correstion system of delay detection error
JPS5389387A (en) Semiconductor photo detector
JPS53125695A (en) Exposing method for electron rays
JPS5268941A (en) Anti time-limiting apparatus
JPS5363077A (en) Reader for quantity of thermofluorescent rays
JPS5366331A (en) Timing detector
JPS5337499A (en) Measuring method for transient specific character of conveyance mechanism
JPS52105724A (en) Light detect ic device
JPS5383740A (en) Papper detector
JPS5287358A (en) Counting method for semiconductor pellets
JPS5250631A (en) Optical symbol reading device