JPS5437473A - Aligment state command circuit - Google Patents

Aligment state command circuit

Info

Publication number
JPS5437473A
JPS5437473A JP10268677A JP10268677A JPS5437473A JP S5437473 A JPS5437473 A JP S5437473A JP 10268677 A JP10268677 A JP 10268677A JP 10268677 A JP10268677 A JP 10268677A JP S5437473 A JPS5437473 A JP S5437473A
Authority
JP
Japan
Prior art keywords
aligment
state command
command circuit
giving
matching action
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10268677A
Other languages
Japanese (ja)
Other versions
JPS6112372B2 (en
Inventor
Youji Yabuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10268677A priority Critical patent/JPS5437473A/en
Publication of JPS5437473A publication Critical patent/JPS5437473A/en
Publication of JPS6112372B2 publication Critical patent/JPS6112372B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To secure an accurate positioning by giving no matching action immediately after the pre-exposure but giving a command for the matching action after confirming that the position detecting state has been giving based on the sudden change of the illumination light.
COPYRIGHT: (C)1979,JPO&Japio
JP10268677A 1977-08-29 1977-08-29 Aligment state command circuit Granted JPS5437473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10268677A JPS5437473A (en) 1977-08-29 1977-08-29 Aligment state command circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10268677A JPS5437473A (en) 1977-08-29 1977-08-29 Aligment state command circuit

Publications (2)

Publication Number Publication Date
JPS5437473A true JPS5437473A (en) 1979-03-19
JPS6112372B2 JPS6112372B2 (en) 1986-04-08

Family

ID=14334113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10268677A Granted JPS5437473A (en) 1977-08-29 1977-08-29 Aligment state command circuit

Country Status (1)

Country Link
JP (1) JPS5437473A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6537836B2 (en) 1999-07-28 2003-03-25 Infineon Technologies Ag Semiconductor structures and manufacturing methods

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6537836B2 (en) 1999-07-28 2003-03-25 Infineon Technologies Ag Semiconductor structures and manufacturing methods
US6950784B2 (en) 1999-07-28 2005-09-27 Infineon Technologies Ag Semiconductor structures and manufacturing methods

Also Published As

Publication number Publication date
JPS6112372B2 (en) 1986-04-08

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