JPS51140577A - Wafer holder for electronic beam exposing device - Google Patents

Wafer holder for electronic beam exposing device

Info

Publication number
JPS51140577A
JPS51140577A JP50064992A JP6499275A JPS51140577A JP S51140577 A JPS51140577 A JP S51140577A JP 50064992 A JP50064992 A JP 50064992A JP 6499275 A JP6499275 A JP 6499275A JP S51140577 A JPS51140577 A JP S51140577A
Authority
JP
Japan
Prior art keywords
electronic beam
wafer holder
exposing device
beam exposing
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50064992A
Other languages
Japanese (ja)
Inventor
Kimio Yanagida
Yasutaka Ban
Kenichi Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50064992A priority Critical patent/JPS51140577A/en
Publication of JPS51140577A publication Critical patent/JPS51140577A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To provide a holder capable of improving the exactness of exposure by reducing the variation of level for the illuminated part of electronic beam caused by the warp of the wafer when making the exposure to electronic beam.
COPYRIGHT: (C)1976,JPO&Japio
JP50064992A 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device Pending JPS51140577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50064992A JPS51140577A (en) 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50064992A JPS51140577A (en) 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device

Publications (1)

Publication Number Publication Date
JPS51140577A true JPS51140577A (en) 1976-12-03

Family

ID=13274053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50064992A Pending JPS51140577A (en) 1975-05-30 1975-05-30 Wafer holder for electronic beam exposing device

Country Status (1)

Country Link
JP (1) JPS51140577A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62260326A (en) * 1986-04-28 1987-11-12 エイ・テイ・アンド・ティ・コーポレーション Method of processing semiconductor wafer
JP2009125336A (en) * 2007-11-26 2009-06-11 Takeshi Kato Joint tool for suction hose

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62260326A (en) * 1986-04-28 1987-11-12 エイ・テイ・アンド・ティ・コーポレーション Method of processing semiconductor wafer
JP2009125336A (en) * 2007-11-26 2009-06-11 Takeshi Kato Joint tool for suction hose

Similar Documents

Publication Publication Date Title
JPS51111076A (en) Exposure device
JPS51140465A (en) Compensating lens
JPS51140577A (en) Wafer holder for electronic beam exposing device
JPS527724A (en) Memory lock circuit for the camera
JPS5258374A (en) Improvement in sensitivity of positive type photo resist
JPS52139381A (en) Electron beam exposure apparatus
JPS53122369A (en) Automatic alignment unit for wafer
JPS5210127A (en) Automatic exposure device
JPS51118968A (en) Electron beam exposure device
JPS51148365A (en) Electron beam exposure method
JPS5347825A (en) Photoresist exposure
JPS5228267A (en) Minute processing
JPS52117569A (en) Electronic beam exposure unit
JPS53120277A (en) Electron beam exposure device
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS5220730A (en) Memory unit
JPS5360162A (en) Electron beam irradiation device
JPS525270A (en) Photo-mask
JPS52119079A (en) Electron beam exposure
JPS51112265A (en) Socket for integrated circuit
JPS5347821A (en) Microfish locator
JPS51142978A (en) Mounting method of circuit elements
JPS53147468A (en) Production of semiconductor device
JPS5437473A (en) Aligment state command circuit
JPS53121468A (en) Manufacture for semiconductor device