JPS5437685A - Electron beam exposure unit - Google Patents

Electron beam exposure unit

Info

Publication number
JPS5437685A
JPS5437685A JP10466077A JP10466077A JPS5437685A JP S5437685 A JPS5437685 A JP S5437685A JP 10466077 A JP10466077 A JP 10466077A JP 10466077 A JP10466077 A JP 10466077A JP S5437685 A JPS5437685 A JP S5437685A
Authority
JP
Japan
Prior art keywords
electron beam
exposure unit
beam exposure
deflector
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10466077A
Other languages
English (en)
Other versions
JPS5419750B2 (ja
Inventor
Masahiro Okabe
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10466077A priority Critical patent/JPS5437685A/ja
Publication of JPS5437685A publication Critical patent/JPS5437685A/ja
Publication of JPS5419750B2 publication Critical patent/JPS5419750B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP10466077A 1977-08-31 1977-08-31 Electron beam exposure unit Granted JPS5437685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10466077A JPS5437685A (en) 1977-08-31 1977-08-31 Electron beam exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10466077A JPS5437685A (en) 1977-08-31 1977-08-31 Electron beam exposure unit

Publications (2)

Publication Number Publication Date
JPS5437685A true JPS5437685A (en) 1979-03-20
JPS5419750B2 JPS5419750B2 (ja) 1979-07-17

Family

ID=14386610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10466077A Granted JPS5437685A (en) 1977-08-31 1977-08-31 Electron beam exposure unit

Country Status (1)

Country Link
JP (1) JPS5437685A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243386A (ja) * 1984-05-18 1985-12-03 Yokogawa Hokushin Electric Corp ロ−ラポンプ用チユ−ブ
JPH03111684A (ja) * 1989-09-26 1991-05-13 Toyo Tire & Rubber Co Ltd 圧送用スクィーズポンピングチューブ及びスクィーズ型ポンプ
JPH0619959B2 (ja) * 1983-06-15 1994-03-16 アメリカン テレフオン アンド テレグラフ カムパニ− 電子放出システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223220A (en) * 1975-08-18 1977-02-22 Toshiba Corp Method of key loading of liquid crystal display type electronic unit a nd integrated circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5223220A (en) * 1975-08-18 1977-02-22 Toshiba Corp Method of key loading of liquid crystal display type electronic unit a nd integrated circuit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0619959B2 (ja) * 1983-06-15 1994-03-16 アメリカン テレフオン アンド テレグラフ カムパニ− 電子放出システム
JPS60243386A (ja) * 1984-05-18 1985-12-03 Yokogawa Hokushin Electric Corp ロ−ラポンプ用チユ−ブ
JPH03111684A (ja) * 1989-09-26 1991-05-13 Toyo Tire & Rubber Co Ltd 圧送用スクィーズポンピングチューブ及びスクィーズ型ポンプ

Also Published As

Publication number Publication date
JPS5419750B2 (ja) 1979-07-17

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