JPS544065A - Impurity diffusion method - Google Patents

Impurity diffusion method

Info

Publication number
JPS544065A
JPS544065A JP6891177A JP6891177A JPS544065A JP S544065 A JPS544065 A JP S544065A JP 6891177 A JP6891177 A JP 6891177A JP 6891177 A JP6891177 A JP 6891177A JP S544065 A JPS544065 A JP S544065A
Authority
JP
Japan
Prior art keywords
impurity diffusion
diffusion method
diffusion
nromal
low temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6891177A
Other languages
Japanese (ja)
Inventor
Kaoru Niino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6891177A priority Critical patent/JPS544065A/en
Publication of JPS544065A publication Critical patent/JPS544065A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prevent out diffusion and automatic doping, by performing diffusion processing at a low temperature under oxidized atmosphere at first, and after that, by performing it at nromal diffusion temperature.
COPYRIGHT: (C)1979,JPO&Japio
JP6891177A 1977-06-13 1977-06-13 Impurity diffusion method Pending JPS544065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6891177A JPS544065A (en) 1977-06-13 1977-06-13 Impurity diffusion method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6891177A JPS544065A (en) 1977-06-13 1977-06-13 Impurity diffusion method

Publications (1)

Publication Number Publication Date
JPS544065A true JPS544065A (en) 1979-01-12

Family

ID=13387300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6891177A Pending JPS544065A (en) 1977-06-13 1977-06-13 Impurity diffusion method

Country Status (1)

Country Link
JP (1) JPS544065A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206023A (en) * 1981-06-12 1982-12-17 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5815269A (en) * 1981-07-21 1983-01-28 Yamagata Nippon Denki Kk Manufacture of semiconductor element
JPS5980928A (en) * 1982-11-01 1984-05-10 Oki Electric Ind Co Ltd Manufacture of semiconductor device
WO2000016391A1 (en) * 1998-09-14 2000-03-23 Matsushita Electric Industrial Co., Ltd. Method for producing semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206023A (en) * 1981-06-12 1982-12-17 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5815269A (en) * 1981-07-21 1983-01-28 Yamagata Nippon Denki Kk Manufacture of semiconductor element
JPS5980928A (en) * 1982-11-01 1984-05-10 Oki Electric Ind Co Ltd Manufacture of semiconductor device
WO2000016391A1 (en) * 1998-09-14 2000-03-23 Matsushita Electric Industrial Co., Ltd. Method for producing semiconductor device
US6620665B1 (en) 1998-09-14 2003-09-16 Matsushita Electric Industrial Co., Ltd. Method for fabricating semiconductor device

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