JPS5441676A - Photo resist coating unit - Google Patents

Photo resist coating unit

Info

Publication number
JPS5441676A
JPS5441676A JP10780777A JP10780777A JPS5441676A JP S5441676 A JPS5441676 A JP S5441676A JP 10780777 A JP10780777 A JP 10780777A JP 10780777 A JP10780777 A JP 10780777A JP S5441676 A JPS5441676 A JP S5441676A
Authority
JP
Japan
Prior art keywords
resist coating
photo resist
coating unit
adhering
jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10780777A
Other languages
Japanese (ja)
Inventor
Yoshiharu Mori
Nobuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10780777A priority Critical patent/JPS5441676A/en
Publication of JPS5441676A publication Critical patent/JPS5441676A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To avoid the adhering of dust to the resist film, by continuously performing the photo resist coating in one package, after cleaning the surface of the semiconductor substrate with jet of high pressure water.
COPYRIGHT: (C)1979,JPO&Japio
JP10780777A 1977-09-09 1977-09-09 Photo resist coating unit Pending JPS5441676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10780777A JPS5441676A (en) 1977-09-09 1977-09-09 Photo resist coating unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10780777A JPS5441676A (en) 1977-09-09 1977-09-09 Photo resist coating unit

Publications (1)

Publication Number Publication Date
JPS5441676A true JPS5441676A (en) 1979-04-03

Family

ID=14468524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10780777A Pending JPS5441676A (en) 1977-09-09 1977-09-09 Photo resist coating unit

Country Status (1)

Country Link
JP (1) JPS5441676A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195046U (en) * 1985-05-27 1986-12-04
JP2010089109A (en) * 2008-10-07 2010-04-22 Disco Abrasive Syst Ltd Method and apparatus for laser machining

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61195046U (en) * 1985-05-27 1986-12-04
JP2010089109A (en) * 2008-10-07 2010-04-22 Disco Abrasive Syst Ltd Method and apparatus for laser machining
TWI504470B (en) * 2008-10-07 2015-10-21 Disco Corp Laser processing method and laser processing device

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