JPS545385A - Production of micropattern - Google Patents

Production of micropattern

Info

Publication number
JPS545385A
JPS545385A JP6981677A JP6981677A JPS545385A JP S545385 A JPS545385 A JP S545385A JP 6981677 A JP6981677 A JP 6981677A JP 6981677 A JP6981677 A JP 6981677A JP S545385 A JPS545385 A JP S545385A
Authority
JP
Japan
Prior art keywords
micropattern
production
tenperature
developer
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6981677A
Other languages
Japanese (ja)
Inventor
Hideki Nishida
Norikazu Tsumita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6981677A priority Critical patent/JPS545385A/en
Publication of JPS545385A publication Critical patent/JPS545385A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Compositions Of Macromolecular Compounds (AREA)

Abstract

PURPOSE: To form a micropattern by keeping the developer at a fixed tenperature and using the poly methyl methacrylate for the resist.
COPYRIGHT: (C)1979,JPO&Japio
JP6981677A 1977-06-15 1977-06-15 Production of micropattern Pending JPS545385A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6981677A JPS545385A (en) 1977-06-15 1977-06-15 Production of micropattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6981677A JPS545385A (en) 1977-06-15 1977-06-15 Production of micropattern

Publications (1)

Publication Number Publication Date
JPS545385A true JPS545385A (en) 1979-01-16

Family

ID=13413653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6981677A Pending JPS545385A (en) 1977-06-15 1977-06-15 Production of micropattern

Country Status (1)

Country Link
JP (1) JPS545385A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55150227A (en) * 1979-05-10 1980-11-22 Nec Corp Method of fabricating pattern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55150227A (en) * 1979-05-10 1980-11-22 Nec Corp Method of fabricating pattern

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