JPS5457948A - Automatic focusing unit for scanning electron microscope and so on - Google Patents

Automatic focusing unit for scanning electron microscope and so on

Info

Publication number
JPS5457948A
JPS5457948A JP12478977A JP12478977A JPS5457948A JP S5457948 A JPS5457948 A JP S5457948A JP 12478977 A JP12478977 A JP 12478977A JP 12478977 A JP12478977 A JP 12478977A JP S5457948 A JPS5457948 A JP S5457948A
Authority
JP
Japan
Prior art keywords
unit
value
circuit
sent
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12478977A
Other languages
Japanese (ja)
Other versions
JPS5816588B2 (en
Inventor
Takao Namae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP52124789A priority Critical patent/JPS5816588B2/en
Publication of JPS5457948A publication Critical patent/JPS5457948A/en
Publication of JPS5816588B2 publication Critical patent/JPS5816588B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To search automatically a focus to improve the operational efficiency of a scanning electron microscope by providing a means, which detects the defocusing of the smaple image obtained by scanning a smaple by electron beam, and constituting this unit so that focusing may be started on a basis of output signals of this means.
CONSTITUTION: Secondary electrons generated from sample 3 by electron beam 1 are detected by detector 6, and the output signals are sent to display device 8. Meanwhile, pulse generator circuit 16 is triggerred to operate automatic focusing unit 9, and change components of detection signals obtained every one horizontal scanning are integrated. Then, the current value of object lens 2 is obtained when the integrated value is maximum, and this value is held in peak hold circuit 12. Here, when defocusing has occurred, the integrated value sent to comparator 14 is reduced; and when this value becomes smaller than a prescribed value sent from potentiometer 15, circuit 16 is triggerred to start the operation of unit 9, and circuit 12 is cleared. As a result, when the focus has gotten worse than the initial focusing state, unit 9 is operated automatically to obtain always good-quality images
COPYRIGHT: (C)1979,JPO&Japio
JP52124789A 1977-10-18 1977-10-18 Automatic focusing device for scanning electron microscopes, etc. Expired JPS5816588B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52124789A JPS5816588B2 (en) 1977-10-18 1977-10-18 Automatic focusing device for scanning electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52124789A JPS5816588B2 (en) 1977-10-18 1977-10-18 Automatic focusing device for scanning electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS5457948A true JPS5457948A (en) 1979-05-10
JPS5816588B2 JPS5816588B2 (en) 1983-03-31

Family

ID=14894151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52124789A Expired JPS5816588B2 (en) 1977-10-18 1977-10-18 Automatic focusing device for scanning electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS5816588B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514634A (en) * 1982-03-02 1985-04-30 Cambridge Instruments Limited Electron beam focussing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5047561A (en) * 1973-08-15 1975-04-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5047561A (en) * 1973-08-15 1975-04-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4514634A (en) * 1982-03-02 1985-04-30 Cambridge Instruments Limited Electron beam focussing

Also Published As

Publication number Publication date
JPS5816588B2 (en) 1983-03-31

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