JPS547876A - Alignment exposure unit - Google Patents

Alignment exposure unit

Info

Publication number
JPS547876A
JPS547876A JP7345477A JP7345477A JPS547876A JP S547876 A JPS547876 A JP S547876A JP 7345477 A JP7345477 A JP 7345477A JP 7345477 A JP7345477 A JP 7345477A JP S547876 A JPS547876 A JP S547876A
Authority
JP
Japan
Prior art keywords
alignment exposure
exposure unit
mask
ringsbetween
lgass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7345477A
Other languages
Japanese (ja)
Inventor
Yoshihiko Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7345477A priority Critical patent/JPS547876A/en
Publication of JPS547876A publication Critical patent/JPS547876A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To perform alignment exposure, by duplicatedly placing two rubber ringsbetween the lgass mask and the support stand cocentrically and by bending the mask to the substrate through reducing the void formed, in the unit used with photo etching method for use with semiconductor devices.
COPYRIGHT: (C)1979,JPO&Japio
JP7345477A 1977-06-20 1977-06-20 Alignment exposure unit Pending JPS547876A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7345477A JPS547876A (en) 1977-06-20 1977-06-20 Alignment exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7345477A JPS547876A (en) 1977-06-20 1977-06-20 Alignment exposure unit

Publications (1)

Publication Number Publication Date
JPS547876A true JPS547876A (en) 1979-01-20

Family

ID=13518690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7345477A Pending JPS547876A (en) 1977-06-20 1977-06-20 Alignment exposure unit

Country Status (1)

Country Link
JP (1) JPS547876A (en)

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