JPS54882A - Manufacture of field effect transistor - Google Patents

Manufacture of field effect transistor

Info

Publication number
JPS54882A
JPS54882A JP6549277A JP6549277A JPS54882A JP S54882 A JPS54882 A JP S54882A JP 6549277 A JP6549277 A JP 6549277A JP 6549277 A JP6549277 A JP 6549277A JP S54882 A JPS54882 A JP S54882A
Authority
JP
Japan
Prior art keywords
manufacture
field effect
effect transistor
enhance
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6549277A
Other languages
Japanese (ja)
Inventor
Toshio Usui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6549277A priority Critical patent/JPS54882A/en
Publication of JPS54882A publication Critical patent/JPS54882A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To reduce the gate length and then to enhance the high frequency properties, by forming a gate electrode through multi-layer lamination of more than two different kinds of metal by use of the self-alignment system.
COPYRIGHT: (C)1979,JPO&Japio
JP6549277A 1977-06-03 1977-06-03 Manufacture of field effect transistor Pending JPS54882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6549277A JPS54882A (en) 1977-06-03 1977-06-03 Manufacture of field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6549277A JPS54882A (en) 1977-06-03 1977-06-03 Manufacture of field effect transistor

Publications (1)

Publication Number Publication Date
JPS54882A true JPS54882A (en) 1979-01-06

Family

ID=13288637

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6549277A Pending JPS54882A (en) 1977-06-03 1977-06-03 Manufacture of field effect transistor

Country Status (1)

Country Link
JP (1) JPS54882A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136374A (en) * 1981-02-18 1982-08-23 Sony Corp Manufacture of semiconductor device
JPS60157262A (en) * 1984-01-26 1985-08-17 Mitsubishi Electric Corp Semiconductor ic
JPS60251671A (en) * 1984-05-29 1985-12-12 Fujitsu Ltd Field-effect type transistor and manufacture thereof
US4684856A (en) * 1983-08-17 1987-08-04 Elevator Gmbh Method and drive for elevator DC drive motor stabilization

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4896289A (en) * 1972-03-24 1973-12-08
JPS4946874A (en) * 1972-09-11 1974-05-07
JPS5040947A (en) * 1974-06-21 1975-04-15

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4896289A (en) * 1972-03-24 1973-12-08
JPS4946874A (en) * 1972-09-11 1974-05-07
JPS5040947A (en) * 1974-06-21 1975-04-15

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57136374A (en) * 1981-02-18 1982-08-23 Sony Corp Manufacture of semiconductor device
US4684856A (en) * 1983-08-17 1987-08-04 Elevator Gmbh Method and drive for elevator DC drive motor stabilization
JPS60157262A (en) * 1984-01-26 1985-08-17 Mitsubishi Electric Corp Semiconductor ic
JPS60251671A (en) * 1984-05-29 1985-12-12 Fujitsu Ltd Field-effect type transistor and manufacture thereof

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