JPS5499441A - Production of electrophotographic photoreceptor - Google Patents

Production of electrophotographic photoreceptor

Info

Publication number
JPS5499441A
JPS5499441A JP595878A JP595878A JPS5499441A JP S5499441 A JPS5499441 A JP S5499441A JP 595878 A JP595878 A JP 595878A JP 595878 A JP595878 A JP 595878A JP S5499441 A JPS5499441 A JP S5499441A
Authority
JP
Japan
Prior art keywords
substrate
vessel
thru
amorphous
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP595878A
Other languages
Japanese (ja)
Other versions
JPS6161101B2 (en
Inventor
Yutaka Hirai
Toshiyuki Komatsu
Katsumi Nakagawa
Teruo Misumi
Tadaharu Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP595878A priority Critical patent/JPS5499441A/en
Priority to US05/971,114 priority patent/US4265991A/en
Priority to AU42715/78A priority patent/AU530905B2/en
Priority to FR7836015A priority patent/FR2412874A1/en
Priority to CA000318403A priority patent/CA1166505A/en
Priority to GB7849872A priority patent/GB2013725B/en
Priority to GB08218178A priority patent/GB2100759B/en
Priority to GB08218177A priority patent/GB2102028B/en
Priority to DE2855718A priority patent/DE2855718C3/en
Publication of JPS5499441A publication Critical patent/JPS5499441A/en
Priority to US06/214,045 priority patent/US4451547A/en
Priority to FR8119504A priority patent/FR2487535B1/fr
Priority to US06/581,435 priority patent/US4507375A/en
Priority to US06/695,428 priority patent/US4552824A/en
Publication of JPS6161101B2 publication Critical patent/JPS6161101B2/ja
Priority to HK424/88A priority patent/HK42488A/en
Priority to HK425/88A priority patent/HK42588A/en
Priority to HK427/88A priority patent/HK42788A/en
Priority to US08/448,123 priority patent/US5585149A/en
Priority to US08/483,154 priority patent/US5658703A/en
Priority to US08/487,560 priority patent/US5640663A/en
Priority to US08/484,910 priority patent/US5756250A/en
Priority to US08/487,561 priority patent/US5576060A/en
Granted legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE: To produce an electrophotographic photoreceptor which is pollutionfree, is superior in heat and moisture resistances and is always stable in its electrophotographic characteristics by forming a photoconductive layer composed of amorphous Si by a glow discharge method or sputtering method.
CONSTITUTION: After a substrate 11 has been fixed to a fixing member 12, a glow discharge vapor deposition vessel 10 is evacuated down to a required degree of vacuum by way of a main valve 29. Next, the substrate 11 is heated by a heater 13 to 50 to 350°C, preferably 100 to 200°C. Thereafter, gases such as SiH4, PH3, Ar are introduced from gas cylinders 16 thru 17 with the flow rates being controlled by flow meters 19 thru 21 and a high frequency voltage is applied from a high frequency power source 14 to the electrodes 15, 15' of capacitance type wound on the outside of the vessel 10. Glow discharges occur in the vessel 10 and the photoconductive layer composed of the amorphous Si introduced with impurities is formed at rates of 0.5 to 100 Å/sec. on the substrate 11.
COPYRIGHT: (C)1979,JPO&Japio
JP595878A 1977-12-22 1978-01-23 Production of electrophotographic photoreceptor Granted JPS5499441A (en)

Priority Applications (21)

Application Number Priority Date Filing Date Title
JP595878A JPS5499441A (en) 1978-01-23 1978-01-23 Production of electrophotographic photoreceptor
US05/971,114 US4265991A (en) 1977-12-22 1978-12-19 Electrophotographic photosensitive member and process for production thereof
AU42715/78A AU530905B2 (en) 1977-12-22 1978-12-19 Electrophotographic photosensitive member
FR7836015A FR2412874A1 (en) 1977-12-22 1978-12-21 PHOTOSENSITIVE ORGAN FOR ELECTROPHOTOGRAPHIC OPERATION AND ITS REALIZATION PROCESS
CA000318403A CA1166505A (en) 1977-12-22 1978-12-21 Electrophotographic photosensitive layer including amorphous silicon containing hydrogen
GB7849872A GB2013725B (en) 1977-12-22 1978-12-22 Electrophotographic photosensitive member and process for production thereof
GB08218178A GB2100759B (en) 1977-12-22 1978-12-22 Electrophotographic photosensitive member and process for production thereof
GB08218177A GB2102028B (en) 1977-12-22 1978-12-22 Electrophotographic photosensitive member and process for production thereof
DE2855718A DE2855718C3 (en) 1977-12-22 1978-12-22 Electrophotographic recording material and method for the production thereof
US06/214,045 US4451547A (en) 1977-12-22 1980-12-08 Electrophotographic α-Si(H) member and process for production thereof
FR8119504A FR2487535B1 (en) 1977-12-22 1981-10-16
US06/581,435 US4507375A (en) 1977-12-22 1984-02-17 Electrophotographic photosensitive member and process for production thereof
US06/695,428 US4552824A (en) 1977-12-22 1985-01-28 Electrophotographic photosensitive member and process for production thereof
HK424/88A HK42488A (en) 1977-12-22 1988-06-09 Electrophotographic photosensitive member and process for production thereof
HK425/88A HK42588A (en) 1977-12-22 1988-06-09 Electrophotographic photosensitive member and process for production thereof
HK427/88A HK42788A (en) 1977-12-22 1988-06-09 Electrophotographic photosensitive member and process for production thereof
US08/448,123 US5585149A (en) 1977-12-22 1995-05-23 CVD method for forming a photoconductive hydrogenated a-Si layer
US08/483,154 US5658703A (en) 1977-12-22 1995-06-07 Electrophotographic photosensitive member and process for production thereof
US08/487,560 US5640663A (en) 1977-12-22 1995-06-07 Electrophotographic method using a cleaning blade to remove residual toner
US08/484,910 US5756250A (en) 1977-12-22 1995-06-07 Electrophotographic method using a cleaning blade to remove residual toner
US08/487,561 US5576060A (en) 1977-12-22 1995-06-07 CVD process of forming hydrogenated a-Si films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP595878A JPS5499441A (en) 1978-01-23 1978-01-23 Production of electrophotographic photoreceptor

Publications (2)

Publication Number Publication Date
JPS5499441A true JPS5499441A (en) 1979-08-06
JPS6161101B2 JPS6161101B2 (en) 1986-12-24

Family

ID=11625391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP595878A Granted JPS5499441A (en) 1977-12-22 1978-01-23 Production of electrophotographic photoreceptor

Country Status (1)

Country Link
JP (1) JPS5499441A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501766A (en) * 1982-02-03 1985-02-26 Tokyo Shibaura Denki Kabushiki Kaisha Film depositing apparatus and a film depositing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4501766A (en) * 1982-02-03 1985-02-26 Tokyo Shibaura Denki Kabushiki Kaisha Film depositing apparatus and a film depositing method

Also Published As

Publication number Publication date
JPS6161101B2 (en) 1986-12-24

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