JPS5511343A - Position detecting device - Google Patents

Position detecting device

Info

Publication number
JPS5511343A
JPS5511343A JP8384478A JP8384478A JPS5511343A JP S5511343 A JPS5511343 A JP S5511343A JP 8384478 A JP8384478 A JP 8384478A JP 8384478 A JP8384478 A JP 8384478A JP S5511343 A JPS5511343 A JP S5511343A
Authority
JP
Japan
Prior art keywords
input
pattern
picture element
information
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8384478A
Other languages
Japanese (ja)
Other versions
JPS5856972B2 (en
Inventor
Yoshiaki Arimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP53083844A priority Critical patent/JPS5856972B2/en
Publication of JPS5511343A publication Critical patent/JPS5511343A/en
Publication of JPS5856972B2 publication Critical patent/JPS5856972B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/50—Bond wires
    • H10W72/541—Dispositions of bond wires
    • H10W72/5449—Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)
  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE: To operate position detection with high precision, without depending on the shape of edges of a chip, by detecting the pattern of the optical image of a semiconductor chip, and processing each picture element information by the level of the image signal based on this.
CONSTITUTION: The picture element information of each scanning line of semiconductor chip 1 obtained by pickup device 7 is input to threshold calculation circuit 12, and the threshold value of the image signal is obtained from the maximum signal level and the minimum signal level of each picture element information. This threshold value is input as comparative a reference level signal to comparators 13aW13d. The picture element informatiom from video change-over circuit 11 is converted into a binary value according to the threshold value. This is input to pattern detector circuit 14 as pattern information. Circuit 14 detects the coincidence of this input and the pattern information preset in setter 15. Target pattern detector circuit 17 detects the coincidence of the target pattern set in setter 18 and the input to be given via shift register 16 and inputs it to computer 19. Computer 19 obtains the pattern position of chip 1 by this input and the information obtained from pickup device 7.
COPYRIGHT: (C)1980,JPO&Japio
JP53083844A 1978-07-10 1978-07-10 position detection device Expired JPS5856972B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53083844A JPS5856972B2 (en) 1978-07-10 1978-07-10 position detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53083844A JPS5856972B2 (en) 1978-07-10 1978-07-10 position detection device

Publications (2)

Publication Number Publication Date
JPS5511343A true JPS5511343A (en) 1980-01-26
JPS5856972B2 JPS5856972B2 (en) 1983-12-17

Family

ID=13814006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53083844A Expired JPS5856972B2 (en) 1978-07-10 1978-07-10 position detection device

Country Status (1)

Country Link
JP (1) JPS5856972B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112185U (en) * 1977-02-15 1978-09-07
JPS5785178A (en) * 1980-11-17 1982-05-27 Fujitsu Ltd Graphic form recognizing method and its device
JPS58179088U (en) * 1982-05-25 1983-11-30 三洋電機株式会社 Dishwasher
JPS59144918A (en) * 1982-12-08 1984-08-20 テキサス・インスツルメンツ・インコ−ポレイテツド Method and apparatus for positioning specified pattern
JPS6146568A (en) * 1984-08-10 1986-03-06 Fuji Electric Co Ltd Arrangement judging device
JPH0490906U (en) * 1990-12-17 1992-08-07
JP2008211265A (en) * 2002-03-15 2008-09-11 Canon Inc Position detection apparatus and method, and exposure apparatus
US7466414B2 (en) 2002-03-15 2008-12-16 Canon Kabushiki Kaisha Position detection apparatus and method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140278A (en) * 1976-05-19 1977-11-22 Hitachi Ltd Position detector

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52140278A (en) * 1976-05-19 1977-11-22 Hitachi Ltd Position detector

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53112185U (en) * 1977-02-15 1978-09-07
JPS5785178A (en) * 1980-11-17 1982-05-27 Fujitsu Ltd Graphic form recognizing method and its device
JPS58179088U (en) * 1982-05-25 1983-11-30 三洋電機株式会社 Dishwasher
JPS59144918A (en) * 1982-12-08 1984-08-20 テキサス・インスツルメンツ・インコ−ポレイテツド Method and apparatus for positioning specified pattern
JPS6146568A (en) * 1984-08-10 1986-03-06 Fuji Electric Co Ltd Arrangement judging device
JPH0490906U (en) * 1990-12-17 1992-08-07
JP2008211265A (en) * 2002-03-15 2008-09-11 Canon Inc Position detection apparatus and method, and exposure apparatus
US7466414B2 (en) 2002-03-15 2008-12-16 Canon Kabushiki Kaisha Position detection apparatus and method

Also Published As

Publication number Publication date
JPS5856972B2 (en) 1983-12-17

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