JPS55128242A - Reflection electron detector - Google Patents

Reflection electron detector

Info

Publication number
JPS55128242A
JPS55128242A JP3554479A JP3554479A JPS55128242A JP S55128242 A JPS55128242 A JP S55128242A JP 3554479 A JP3554479 A JP 3554479A JP 3554479 A JP3554479 A JP 3554479A JP S55128242 A JPS55128242 A JP S55128242A
Authority
JP
Japan
Prior art keywords
sample
luminous body
electron
electron beam
luminous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3554479A
Other languages
Japanese (ja)
Inventor
Minoru Saito
Tadashi Otaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3554479A priority Critical patent/JPS55128242A/en
Publication of JPS55128242A publication Critical patent/JPS55128242A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To highly sensitively observe a reflected electron image of the sample, by arranging a luminous body, which is provided with a hole for electron beams to pass through and activated by reflecting electrons, between the sample and objective lens and conducting a light of said luminous body to a photodetector by phototransmitting materials.
CONSTITUTION: If electron beams 2 are focused by an objective lens 1 and irradiated to a sample 3, reflecting electrons 4 are generated from the sample 3 and allowed to hit a luminous body 5. The luminous body 5 is providing a hole for the electron beam to pass through in its central part and consisting of a transparent plate onto which fluorescent substances energized by the electron beam are applied or a thin plate of luminous resin. To its rear face is connected one end of an optical fiber flux 6. Accordingly, the amount of electron reflected from the sample 3 is conducted to a photoelectric multiplier tube 7 through the luminous body 5 and optical fiber flux 6 and its detected signal is applied to CRTs and intensity modulated, simultaneously actuating its deflecting coil with a synchronization to scanning of the electron beam 2, resulting in the observation highly sensitively capable for a reflection electron image of the sample 3.
COPYRIGHT: (C)1980,JPO&Japio
JP3554479A 1979-03-28 1979-03-28 Reflection electron detector Pending JPS55128242A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3554479A JPS55128242A (en) 1979-03-28 1979-03-28 Reflection electron detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3554479A JPS55128242A (en) 1979-03-28 1979-03-28 Reflection electron detector

Publications (1)

Publication Number Publication Date
JPS55128242A true JPS55128242A (en) 1980-10-03

Family

ID=12444662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3554479A Pending JPS55128242A (en) 1979-03-28 1979-03-28 Reflection electron detector

Country Status (1)

Country Link
JP (1) JPS55128242A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03182039A (en) * 1989-12-04 1991-08-08 Internatl Business Mach Corp <Ibm> Magnetic filter system low loss scanning type electron microscope
US8354638B2 (en) 2008-08-20 2013-01-15 Advantest Corp. Electron detection device and scanning electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03182039A (en) * 1989-12-04 1991-08-08 Internatl Business Mach Corp <Ibm> Magnetic filter system low loss scanning type electron microscope
US8354638B2 (en) 2008-08-20 2013-01-15 Advantest Corp. Electron detection device and scanning electron microscope

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