JPS55147629A - Photomask substrate working method - Google Patents

Photomask substrate working method

Info

Publication number
JPS55147629A
JPS55147629A JP5569279A JP5569279A JPS55147629A JP S55147629 A JPS55147629 A JP S55147629A JP 5569279 A JP5569279 A JP 5569279A JP 5569279 A JP5569279 A JP 5569279A JP S55147629 A JPS55147629 A JP S55147629A
Authority
JP
Japan
Prior art keywords
substrate
photomask
pinholes
chamfering
covered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5569279A
Other languages
Japanese (ja)
Other versions
JPS6140100B2 (en
Inventor
Kaoru Asao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP5569279A priority Critical patent/JPS55147629A/en
Publication of JPS55147629A publication Critical patent/JPS55147629A/en
Publication of JPS6140100B2 publication Critical patent/JPS6140100B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To reduce occurrence of pinholes and enhance the yield by chamfering a photomask substrate and covering the chamfered surface having many fine protrusions with a covering material. CONSTITUTION:Glass substrate 1 for a photomask is chamfered 2 by grinding on a grindstone, and the whole chamfered surface is covered 3 with silicone or epoxy type resin or the like. Thus, the surface microcracked owing to many fine glass protrusions formed by the chamfering is covered to prevent occurrence of pinholes. On cover 3 chromium or chromium oxide film 4 is formed. Using this substrate a worked substrate applicable to manufacture a highly integrated semiconductor with a high accuracy pattern is obtd.
JP5569279A 1979-05-09 1979-05-09 Photomask substrate working method Granted JPS55147629A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5569279A JPS55147629A (en) 1979-05-09 1979-05-09 Photomask substrate working method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5569279A JPS55147629A (en) 1979-05-09 1979-05-09 Photomask substrate working method

Publications (2)

Publication Number Publication Date
JPS55147629A true JPS55147629A (en) 1980-11-17
JPS6140100B2 JPS6140100B2 (en) 1986-09-08

Family

ID=13005944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5569279A Granted JPS55147629A (en) 1979-05-09 1979-05-09 Photomask substrate working method

Country Status (1)

Country Link
JP (1) JPS55147629A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005333124A (en) * 2004-04-22 2005-12-02 Asahi Glass Co Ltd Low expansion glass substrate for reflective mask and reflective mask
JPWO2021229968A1 (en) * 2020-05-13 2021-11-18
JPWO2021229967A1 (en) * 2020-05-13 2021-11-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005333124A (en) * 2004-04-22 2005-12-02 Asahi Glass Co Ltd Low expansion glass substrate for reflective mask and reflective mask
JPWO2021229968A1 (en) * 2020-05-13 2021-11-18
JPWO2021229967A1 (en) * 2020-05-13 2021-11-18

Also Published As

Publication number Publication date
JPS6140100B2 (en) 1986-09-08

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