JPS55150221A - Semiconductor fabricating process control system - Google Patents

Semiconductor fabricating process control system

Info

Publication number
JPS55150221A
JPS55150221A JP5741379A JP5741379A JPS55150221A JP S55150221 A JPS55150221 A JP S55150221A JP 5741379 A JP5741379 A JP 5741379A JP 5741379 A JP5741379 A JP 5741379A JP S55150221 A JPS55150221 A JP S55150221A
Authority
JP
Japan
Prior art keywords
controllers
control system
machines
wafers
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5741379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6223449B2 (2
Inventor
Shigeo Furuguchi
Toshio Yonezawa
Hidekuni Ishida
Masatoshi Matsushita
Masayuki Kitano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5741379A priority Critical patent/JPS55150221A/ja
Publication of JPS55150221A publication Critical patent/JPS55150221A/ja
Publication of JPS6223449B2 publication Critical patent/JPS6223449B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Feedback Control In General (AREA)
JP5741379A 1979-05-10 1979-05-10 Semiconductor fabricating process control system Granted JPS55150221A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5741379A JPS55150221A (en) 1979-05-10 1979-05-10 Semiconductor fabricating process control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5741379A JPS55150221A (en) 1979-05-10 1979-05-10 Semiconductor fabricating process control system

Publications (2)

Publication Number Publication Date
JPS55150221A true JPS55150221A (en) 1980-11-22
JPS6223449B2 JPS6223449B2 (2) 1987-05-22

Family

ID=13054953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5741379A Granted JPS55150221A (en) 1979-05-10 1979-05-10 Semiconductor fabricating process control system

Country Status (1)

Country Link
JP (1) JPS55150221A (2)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918651A (ja) * 1982-07-22 1984-01-31 Toshiba Corp 半導体ウエハ製造方法
JPS63249328A (ja) * 1987-04-03 1988-10-17 Mitsubishi Electric Corp 物品の製造システム及び物品の製造方法
US6469518B1 (en) * 2000-01-07 2002-10-22 Advanced Micro Devices, Inc. Method and apparatus for determining measurement frequency based on hardware age and usage
JP2003519922A (ja) * 2000-01-04 2003-06-24 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド 超小型電子機器製造において最適な加工ターゲットを定めるための方法
JP2012212919A (ja) * 2012-06-22 2012-11-01 Hitachi Kokusai Electric Inc 基板処理管理装置
JP2017090947A (ja) * 2015-11-02 2017-05-25 オムロン株式会社 製造プロセスの予測システムおよび予測制御システム

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918651A (ja) * 1982-07-22 1984-01-31 Toshiba Corp 半導体ウエハ製造方法
JPS63249328A (ja) * 1987-04-03 1988-10-17 Mitsubishi Electric Corp 物品の製造システム及び物品の製造方法
JP2003519922A (ja) * 2000-01-04 2003-06-24 アドバンスト・マイクロ・ディバイシズ・インコーポレイテッド 超小型電子機器製造において最適な加工ターゲットを定めるための方法
US6469518B1 (en) * 2000-01-07 2002-10-22 Advanced Micro Devices, Inc. Method and apparatus for determining measurement frequency based on hardware age and usage
KR100708426B1 (ko) * 2000-01-07 2007-04-18 어드밴스드 마이크로 디바이시즈, 인코포레이티드 하드웨어 연령과 사용을 기반으로 측정빈도를 결정하기 위한 방법 및 장치
JP2012212919A (ja) * 2012-06-22 2012-11-01 Hitachi Kokusai Electric Inc 基板処理管理装置
JP2017090947A (ja) * 2015-11-02 2017-05-25 オムロン株式会社 製造プロセスの予測システムおよび予測制御システム

Also Published As

Publication number Publication date
JPS6223449B2 (2) 1987-05-22

Similar Documents

Publication Publication Date Title
JPS55146552A (en) N 1 backkup method of dispersion type hierarchy system
JPS6435604A (en) Manufacturing apparatus
JPS55150221A (en) Semiconductor fabricating process control system
JPS5289874A (en) Numerical control of machine tool with two or more saddles
JPS551713A (en) Control unit at fifld for plants
SE8100054L (sv) Kommunikationsreglerutrustning
JPS5786972A (en) Doubled computer system
JPS5368940A (en) Information transmission system
ES8706987A1 (es) Un aparato de control del transporte de datos
JPS52151487A (en) Process control system in electronic computer
JPS56135266A (en) Data processing system
JPS5299737A (en) Multi computer control system
JPS5324743A (en) Bus selector for electronic computer
JPS5427740A (en) Information processing unit
JPS5271147A (en) Common panel control system for data processing unit
JPS56111905A (en) Programmable sequence controller
JPS5769439A (en) Processing system for commodity sale data
JPS57195640A (en) Control system for tire press
JPS5481741A (en) Data processing system
JPS5478006A (en) Data transfer system
JPS56155403A (en) Backup system for process control system
JPS57105021A (en) Input/output device
JPS5427676A (en) Process control system
JPS5759220A (en) Data transfer system
JPS57201952A (en) Data setting method of decentralized computer controller