JPS6223449B2 - - Google Patents

Info

Publication number
JPS6223449B2
JPS6223449B2 JP54057413A JP5741379A JPS6223449B2 JP S6223449 B2 JPS6223449 B2 JP S6223449B2 JP 54057413 A JP54057413 A JP 54057413A JP 5741379 A JP5741379 A JP 5741379A JP S6223449 B2 JPS6223449 B2 JP S6223449B2
Authority
JP
Japan
Prior art keywords
control
data
machine
measuring
characteristic data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54057413A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55150221A (en
Inventor
Shigeo Furuguchi
Toshio Yonezawa
Hidekuni Ishida
Masatoshi Matsushita
Masayuki Kitano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP5741379A priority Critical patent/JPS55150221A/ja
Publication of JPS55150221A publication Critical patent/JPS55150221A/ja
Publication of JPS6223449B2 publication Critical patent/JPS6223449B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Feedback Control In General (AREA)
JP5741379A 1979-05-10 1979-05-10 Semiconductor fabricating process control system Granted JPS55150221A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5741379A JPS55150221A (en) 1979-05-10 1979-05-10 Semiconductor fabricating process control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5741379A JPS55150221A (en) 1979-05-10 1979-05-10 Semiconductor fabricating process control system

Publications (2)

Publication Number Publication Date
JPS55150221A JPS55150221A (en) 1980-11-22
JPS6223449B2 true JPS6223449B2 (2) 1987-05-22

Family

ID=13054953

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5741379A Granted JPS55150221A (en) 1979-05-10 1979-05-10 Semiconductor fabricating process control system

Country Status (1)

Country Link
JP (1) JPS55150221A (2)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918651A (ja) * 1982-07-22 1984-01-31 Toshiba Corp 半導体ウエハ製造方法
JPH0616475B2 (ja) * 1987-04-03 1994-03-02 三菱電機株式会社 物品の製造システム及び物品の製造方法
US6470230B1 (en) * 2000-01-04 2002-10-22 Advanced Micro Devices, Inc. Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication
US6469518B1 (en) * 2000-01-07 2002-10-22 Advanced Micro Devices, Inc. Method and apparatus for determining measurement frequency based on hardware age and usage
JP2012212919A (ja) * 2012-06-22 2012-11-01 Hitachi Kokusai Electric Inc 基板処理管理装置
JP6477423B2 (ja) * 2015-11-02 2019-03-06 オムロン株式会社 製造プロセスの予測システムおよび予測制御システム

Also Published As

Publication number Publication date
JPS55150221A (en) 1980-11-22

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