JPS5520457A - Surface form measuring method - Google Patents

Surface form measuring method

Info

Publication number
JPS5520457A
JPS5520457A JP9367278A JP9367278A JPS5520457A JP S5520457 A JPS5520457 A JP S5520457A JP 9367278 A JP9367278 A JP 9367278A JP 9367278 A JP9367278 A JP 9367278A JP S5520457 A JPS5520457 A JP S5520457A
Authority
JP
Japan
Prior art keywords
grid
projection
lens system
moire stripes
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9367278A
Other languages
Japanese (ja)
Inventor
Korekiyo Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
COSMO CONSULTANT KK
Original Assignee
COSMO CONSULTANT KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by COSMO CONSULTANT KK filed Critical COSMO CONSULTANT KK
Priority to JP9367278A priority Critical patent/JPS5520457A/en
Publication of JPS5520457A publication Critical patent/JPS5520457A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To obtain a clear moire stripes by selecting properly a diffraction degree in a filter to make the stripe interval indication value of moire stripes adjustable by filtering and observing moire stripes in the light cutting method dependent upon moire stripes.
CONSTITUTION: The light from light source 1 becomes a spot light source by condenser lens 2 and becomes a parallel light by collimator lens 5 and is irradiated to projection grid 6. This projection grid 6 is projected obliquely onto the surface of sample 10 through projection lens system 7. Projection lens system 7 constitutes a telecentric system, and the real image of projection grid 6 is focused on the surface of sample 10 so that convexes and concaves may be cut obliquely. The image of projection grid 6 deformed on the surface of sample 10 is focused through observing lens system 11. Then, reference grid 14 is arranged on the focusing face of observing lens system 11 so that the grid direction of grid 14 may be parallel with that of projection grid 6, and projection grid 6 and lens system 11 are superposed to each other. This superposition is filtered on the Fourier conversion face by Fourier conversion lens 15 and filter 16, thus forming moire stripes of a required degree.
COPYRIGHT: (C)1980,JPO&Japio
JP9367278A 1978-08-02 1978-08-02 Surface form measuring method Pending JPS5520457A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9367278A JPS5520457A (en) 1978-08-02 1978-08-02 Surface form measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9367278A JPS5520457A (en) 1978-08-02 1978-08-02 Surface form measuring method

Publications (1)

Publication Number Publication Date
JPS5520457A true JPS5520457A (en) 1980-02-13

Family

ID=14088887

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9367278A Pending JPS5520457A (en) 1978-08-02 1978-08-02 Surface form measuring method

Country Status (1)

Country Link
JP (1) JPS5520457A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04199142A (en) * 1990-11-29 1992-07-20 Matsushita Electric Ind Co Ltd Oil film control system video projector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04199142A (en) * 1990-11-29 1992-07-20 Matsushita Electric Ind Co Ltd Oil film control system video projector

Similar Documents

Publication Publication Date Title
JPS5647933A (en) Optical signal head
JPS5541739A (en) Micro-projection type mask alignment device
JPS6426834A (en) Method of obtaining x ray image data and apparatus for storing x ray image
JPS5612615A (en) High rosolution microscope
JPS52147430A (en) Focus detection device
DE2253492A1 (en) PROJECTION METHOD FOR CREATING A COPY OF A PHOTOMASK
JPS52117690A (en) Zeeman atomic absorption analysis and apparatus therefor
JPS5589806A (en) Optical making method of diffusion plate
DE3248512A1 (en) CIRCULAR FRESNEL LENS
JPS5633621A (en) Directional high cut space frequency filter
JPS5318387A (en) Pattern inspection system
JPS53105223A (en) Optical system of distance detector for automatic focusing
JPS57211504A (en) Observation member for talbot interferometer
JPS5515046A (en) Testing unit of moving object surface
JPS56122906A (en) Measuring method for surface flatness of magnetic recording medium
DE2349010C3 (en) Method and apparatus for recording color images
JPS5643539A (en) Defect inspection device of face plate
JPS5622902A (en) Measuring method for thickness of transparent plate
JPS55158505A (en) Knifed mark inspector
JPS52155922A (en) Pattern verifying unit for letter and graph
DE491208C (en) Method for eliminating the moire effect when reproducing a film with linear light-refracting elements for color projection according to R. Berthon D. R. P. 223236 onto an unexposed film of this kind
JPS5468647A (en) Light beam scanner
JPS5342024A (en) Focusing plate of diffraction grating
DE583616C (en) Production of multi-color photographic or cinematographic projection images
JPS55124008A (en) Defect inspecting apparatus