JPS5541736A - Detection of mark location - Google Patents

Detection of mark location

Info

Publication number
JPS5541736A
JPS5541736A JP11462578A JP11462578A JPS5541736A JP S5541736 A JPS5541736 A JP S5541736A JP 11462578 A JP11462578 A JP 11462578A JP 11462578 A JP11462578 A JP 11462578A JP S5541736 A JPS5541736 A JP S5541736A
Authority
JP
Japan
Prior art keywords
mark
detecting
location
synchronous detection
electron beams
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11462578A
Other languages
Japanese (ja)
Other versions
JPS5616546B2 (en
Inventor
Katsuhiro Kuroda
Kiichi Takagi
Nobuo Shimazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
NTT Inc
Original Assignee
Hitachi Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Nippon Telegraph and Telephone Corp filed Critical Hitachi Ltd
Priority to JP11462578A priority Critical patent/JPS5541736A/en
Publication of JPS5541736A publication Critical patent/JPS5541736A/en
Publication of JPS5616546B2 publication Critical patent/JPS5616546B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To provide a device for detecting the location of a mark on a sample surface with ease and accuracy by scanning electron beams to the mark in accordance with certain scanning speed signals coupled with sine waves, and applying synchronous detection to the detecting output in consideration of the sine waves. CONSTITUTION:Electron beams 1 are scanned over a mark 3 provided on a sample surface 2, thereby to detect the location of the mark. In this device, the scanning of electron beams 1 is conducted by use of a detecting apparatus besides a signal oscillator 6 comprising a lamp generator and a sine wave generator, while the reflecting or passing electrons of the beams 1 are detected by use of an electron beam detector 7 or 8. With the detecting signals having passed an amplifier 9 and the sine wave phase at the signal oscillator 6 being adjusted by a changer 10, synchronous detection is carried out by a detector 11. Following the synchronous detection, observation is conducted by an observation apparatus 13 by way of a smoothing circuit 12. Thus, the mark location on the sample can be detected easily and accurately.
JP11462578A 1978-09-20 1978-09-20 Detection of mark location Granted JPS5541736A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11462578A JPS5541736A (en) 1978-09-20 1978-09-20 Detection of mark location

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11462578A JPS5541736A (en) 1978-09-20 1978-09-20 Detection of mark location

Publications (2)

Publication Number Publication Date
JPS5541736A true JPS5541736A (en) 1980-03-24
JPS5616546B2 JPS5616546B2 (en) 1981-04-16

Family

ID=14642530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11462578A Granted JPS5541736A (en) 1978-09-20 1978-09-20 Detection of mark location

Country Status (1)

Country Link
JP (1) JPS5541736A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598333A (en) * 1982-07-07 1984-01-17 Hitachi Ltd Electron-ray drawing device
JPS5924116U (en) * 1982-07-31 1984-02-15 日野自動車株式会社 fuel filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598333A (en) * 1982-07-07 1984-01-17 Hitachi Ltd Electron-ray drawing device
JPS5924116U (en) * 1982-07-31 1984-02-15 日野自動車株式会社 fuel filter

Also Published As

Publication number Publication date
JPS5616546B2 (en) 1981-04-16

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