JPS5543860A - Moving table mechanism - Google Patents

Moving table mechanism

Info

Publication number
JPS5543860A
JPS5543860A JP11654878A JP11654878A JPS5543860A JP S5543860 A JPS5543860 A JP S5543860A JP 11654878 A JP11654878 A JP 11654878A JP 11654878 A JP11654878 A JP 11654878A JP S5543860 A JPS5543860 A JP S5543860A
Authority
JP
Japan
Prior art keywords
moving table
support
sphere
groove
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11654878A
Other languages
Japanese (ja)
Inventor
Junichi Otani
Masahiro Horii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11654878A priority Critical patent/JPS5543860A/en
Publication of JPS5543860A publication Critical patent/JPS5543860A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To secure a high precision moving behavior of a semiconductor device for pellet bonding operation by arranging a sphere in a receiving groove for support and moving table, thereby holding the support and the moving table through spring force.
CONSTITUTION: There is loaded a moving table 16 on a support 15 both of which are nearly of a size. Then, a sphere supporting structure 17 in V-groove is provided on a zone whereat sides of both the two are facing each other. There is also provided a sphere supporting structure 20 in V-groove on the top of the table 16 intermediately with a slender guide rail 19. And a plate spring adjusting screw 25 is arranged on a double wall of a top projection 22 of a column 21. Thus the guide rail 19, the moving table 16 and the support 15 are pressed each other. Therefore a play is not allowed to work on the sphere supporting structures 17, 20 according to both V-grooves, and the moving table 16 comes to work at high precision.
COPYRIGHT: (C)1980,JPO&Japio
JP11654878A 1978-09-25 1978-09-25 Moving table mechanism Pending JPS5543860A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11654878A JPS5543860A (en) 1978-09-25 1978-09-25 Moving table mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11654878A JPS5543860A (en) 1978-09-25 1978-09-25 Moving table mechanism

Publications (1)

Publication Number Publication Date
JPS5543860A true JPS5543860A (en) 1980-03-27

Family

ID=14689831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11654878A Pending JPS5543860A (en) 1978-09-25 1978-09-25 Moving table mechanism

Country Status (1)

Country Link
JP (1) JPS5543860A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100433U (en) * 1980-12-12 1982-06-21
JPS59132735U (en) * 1983-02-27 1984-09-05 ナショナル住宅産業株式会社 Screw tightening device
JPS60242931A (en) * 1984-05-14 1985-12-02 Sekisui Chem Co Ltd Carrying apparatus for frame for housing unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57100433U (en) * 1980-12-12 1982-06-21
JPS59132735U (en) * 1983-02-27 1984-09-05 ナショナル住宅産業株式会社 Screw tightening device
JPS60242931A (en) * 1984-05-14 1985-12-02 Sekisui Chem Co Ltd Carrying apparatus for frame for housing unit

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