JPS5545232A - Piezo-electric vibrator - Google Patents

Piezo-electric vibrator

Info

Publication number
JPS5545232A
JPS5545232A JP11828178A JP11828178A JPS5545232A JP S5545232 A JPS5545232 A JP S5545232A JP 11828178 A JP11828178 A JP 11828178A JP 11828178 A JP11828178 A JP 11828178A JP S5545232 A JPS5545232 A JP S5545232A
Authority
JP
Japan
Prior art keywords
vibrator
zinc oxide
piezo
thin plate
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11828178A
Other languages
Japanese (ja)
Inventor
Tsuneo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP11828178A priority Critical patent/JPS5545232A/en
Publication of JPS5545232A publication Critical patent/JPS5545232A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/09—Elastic or damping supports

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To obtain a micro piezo-electric vibrator which is easy to produce and has a low resonance frequency, by providing a zinc oxide film, where the C axis is oriented vertically to the plate face, on a non-piezo-electric thin plate and exciting bending vibration in a direction vertical to the thin plate face by the piezo-electric property of this film. CONSTITUTION:Zinc oxide film 5 where the C axis is oriented vertically to the face is provided on the upper face of vibrator 1 formed by a thin plate of ever elastic materials such as an elinver and a co-elinver; and when a positive voltage and a negative voltage are applied to electrodes 2a and 2b respectively, vibrator material 1 becomes an intermediate potential between electrodes 2a and 2b. Consequently, a downward electric field and an upward electric field are applied to zinc oxide 5 between electrode 2a and vibrator 1 and zinc oxide under electride 2b respectively. Distortion of expansion and compression is generated in opposite directions in parts of electrodes 2a and 2b by the piezo-electric property of the zinc oxide film, and vibrator 1 can excite vibration in a direction vertical to the thin plate face. As a result, the change of the resonance frequency dependent upon temperatures near the room temperature can be zero approximately by using ever elastic materials such as an elinver for vibrator 1. Then, the resonance frequency becomes 1/4 or 5 of the conventional crystal vibrator.
JP11828178A 1978-09-26 1978-09-26 Piezo-electric vibrator Pending JPS5545232A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11828178A JPS5545232A (en) 1978-09-26 1978-09-26 Piezo-electric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11828178A JPS5545232A (en) 1978-09-26 1978-09-26 Piezo-electric vibrator

Publications (1)

Publication Number Publication Date
JPS5545232A true JPS5545232A (en) 1980-03-29

Family

ID=14732772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11828178A Pending JPS5545232A (en) 1978-09-26 1978-09-26 Piezo-electric vibrator

Country Status (1)

Country Link
JP (1) JPS5545232A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014533009A (en) * 2011-10-19 2014-12-08 ルメダイン テクノロジーズ インコーポレイテッド Resonator with low acceleration sensitivity and phase noise using time domain switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014533009A (en) * 2011-10-19 2014-12-08 ルメダイン テクノロジーズ インコーポレイテッド Resonator with low acceleration sensitivity and phase noise using time domain switch

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