JPS5454594A - Case of micro piezo-electric vibrator - Google Patents

Case of micro piezo-electric vibrator

Info

Publication number
JPS5454594A
JPS5454594A JP12126377A JP12126377A JPS5454594A JP S5454594 A JPS5454594 A JP S5454594A JP 12126377 A JP12126377 A JP 12126377A JP 12126377 A JP12126377 A JP 12126377A JP S5454594 A JPS5454594 A JP S5454594A
Authority
JP
Japan
Prior art keywords
case
vibrator
cover part
metal layer
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12126377A
Other languages
Japanese (ja)
Inventor
Yukio Miya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP12126377A priority Critical patent/JPS5454594A/en
Priority to US05/907,464 priority patent/US4191905A/en
Priority to GB23055/78A priority patent/GB1602008A/en
Publication of JPS5454594A publication Critical patent/JPS5454594A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To facilitate fixing of the vibrator and facilitate the production of the case by forming the material of the case with an insulating material such as plate glass or other and providing the support parts for fixing of the vibrator protrusively from the cover part bond of the case. CONSTITUTION:In the case of the micro piezoelectric vibrator, the case for containing a crystal vibrator 15 is constituted by the portion where a raised part 8a is provided to a glass member 8 and a cover part 11. A conductive metal layer 9 is formed in thin film from the top of the raised part 8a to the tapered and bottom flat parts and further an insulation layer 10 is formed on the bottom flat part. A bonding metal layer 12 bonding to the cover part 11 is formed on the top part of said insulating layer 10 and the bottom flat part enclosing the vibrator 15. At the same time, an electrode lead-out part 13 and a vibrating fixing metal layer 14 are formed. A soft metal 16 is interposed between the bonding metal layer 12 and the bottom face of the cover part 11 of this constitution and these are vacuum sealed. A free space is formed between the bottom face of the case and the vibrator 15 and between the cover part 11 and vibrator 15.
JP12126377A 1977-06-17 1977-10-08 Case of micro piezo-electric vibrator Pending JPS5454594A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12126377A JPS5454594A (en) 1977-10-08 1977-10-08 Case of micro piezo-electric vibrator
US05/907,464 US4191905A (en) 1977-06-17 1978-05-19 Sealed housings for a subminiature piezoelectric vibrator
GB23055/78A GB1602008A (en) 1977-06-17 1978-05-26 Subminiature piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12126377A JPS5454594A (en) 1977-10-08 1977-10-08 Case of micro piezo-electric vibrator

Publications (1)

Publication Number Publication Date
JPS5454594A true JPS5454594A (en) 1979-04-28

Family

ID=14806914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12126377A Pending JPS5454594A (en) 1977-06-17 1977-10-08 Case of micro piezo-electric vibrator

Country Status (1)

Country Link
JP (1) JPS5454594A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940715A (en) * 1982-04-27 1984-03-06 Toyo Commun Equip Co Ltd Package of piezoelectric oscillator
US6545392B2 (en) * 2000-03-15 2003-04-08 Seiko Epson Corporation Package structure for a piezoelectric resonator
JP2007129326A (en) * 2005-11-01 2007-05-24 Seiko Instruments Inc Piezoelectric vibrator and manufacturing method thereof, oscillator, radio timepiece, and electronic device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940715A (en) * 1982-04-27 1984-03-06 Toyo Commun Equip Co Ltd Package of piezoelectric oscillator
US6545392B2 (en) * 2000-03-15 2003-04-08 Seiko Epson Corporation Package structure for a piezoelectric resonator
JP2007129326A (en) * 2005-11-01 2007-05-24 Seiko Instruments Inc Piezoelectric vibrator and manufacturing method thereof, oscillator, radio timepiece, and electronic device

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