JPS5545513A - Charged particle beam machining device - Google Patents

Charged particle beam machining device

Info

Publication number
JPS5545513A
JPS5545513A JP11706578A JP11706578A JPS5545513A JP S5545513 A JPS5545513 A JP S5545513A JP 11706578 A JP11706578 A JP 11706578A JP 11706578 A JP11706578 A JP 11706578A JP S5545513 A JPS5545513 A JP S5545513A
Authority
JP
Japan
Prior art keywords
electron beam
work
axis
focusing
machining
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11706578A
Other languages
Japanese (ja)
Other versions
JPS6233034B2 (en
Inventor
Asaki Takemoto
Seiji Mochida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp, Osaka Transformer Co Ltd filed Critical Daihen Corp
Priority to JP11706578A priority Critical patent/JPS5545513A/en
Publication of JPS5545513A publication Critical patent/JPS5545513A/en
Publication of JPS6233034B2 publication Critical patent/JPS6233034B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

PURPOSE: To adjust the focusing position of the electron beam of the part to be machined to perform machining evenly and improve performance by providing a position adjusting means to the focusing means of charged particle beams.
CONSTITUTION: After the work 5 is positioned on a stage 4, the specified vacuum state is maintained by the exhaust device connected to the opening part 101 of a vacuum chamber 1. Thereafter, a focusing means 8 is adjusted approximately right under an electron beam generator 6 by an adjusting means 12. Next, the position of the focusing means 8 is so adjusted that the electron beam 7 generated radiates the machining part. Then, while the moving table 3 and work 5 are being moved in the direction of X1 or X2, machining is accomplished. If at this time, the surface of the work 5 is not even and has a serration t, then the focusing means 8 is lowered by the height corresponding to the height t by an adjusting mechanism 121. If the adjusting means 12 is made adjustable with respect to the X-axis, Y-axis, Z-axis, then fine adjustment may be accomplished.
COPYRIGHT: (C)1980,JPO&Japio
JP11706578A 1978-09-22 1978-09-22 Charged particle beam machining device Granted JPS5545513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11706578A JPS5545513A (en) 1978-09-22 1978-09-22 Charged particle beam machining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11706578A JPS5545513A (en) 1978-09-22 1978-09-22 Charged particle beam machining device

Publications (2)

Publication Number Publication Date
JPS5545513A true JPS5545513A (en) 1980-03-31
JPS6233034B2 JPS6233034B2 (en) 1987-07-17

Family

ID=14702546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11706578A Granted JPS5545513A (en) 1978-09-22 1978-09-22 Charged particle beam machining device

Country Status (1)

Country Link
JP (1) JPS5545513A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012036443A (en) * 2010-08-06 2012-02-23 Jfe Steel Corp Electron beam irradiation method
CN103433650A (en) * 2013-07-18 2013-12-11 杭州博数土木工程技术有限公司 Absorption-type vacuum welding equipment and process

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52103965A (en) * 1976-02-25 1977-08-31 Toshiba Corp Electron beam projector unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52103965A (en) * 1976-02-25 1977-08-31 Toshiba Corp Electron beam projector unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012036443A (en) * 2010-08-06 2012-02-23 Jfe Steel Corp Electron beam irradiation method
CN103433650A (en) * 2013-07-18 2013-12-11 杭州博数土木工程技术有限公司 Absorption-type vacuum welding equipment and process

Also Published As

Publication number Publication date
JPS6233034B2 (en) 1987-07-17

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