JPS554762A - Production of thin film magnetic head - Google Patents

Production of thin film magnetic head

Info

Publication number
JPS554762A
JPS554762A JP7817478A JP7817478A JPS554762A JP S554762 A JPS554762 A JP S554762A JP 7817478 A JP7817478 A JP 7817478A JP 7817478 A JP7817478 A JP 7817478A JP S554762 A JPS554762 A JP S554762A
Authority
JP
Japan
Prior art keywords
layer
thin film
sio
permalloy
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7817478A
Other languages
Japanese (ja)
Inventor
Yoshimasa Miura
Kunio Hata
Tomio Kume
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7817478A priority Critical patent/JPS554762A/en
Publication of JPS554762A publication Critical patent/JPS554762A/en
Pending legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE: To prevent a SiO2 thin film from being removed in undesired positions due to defects of a resistor layer when the SiO2 thin film is etched, by providing previously a permalloy thin film on the SiO2 thin film covering a coil conductor.
CONSTITUTION: Lower magnetic layer 10 consisting of permalloy is formed on substrate 100 consisting of a non-magnetic insulator. Coil conductor 30a and insulating layer 20 consisting of SiO2 are laminated alternately on layer 10. Next, protection layer 50 consisting of permalloy is formed with a thickness of approximately 0.2 to 0.5μm on layer 20 except part A where a back yoke should be formed. Next, though resistor layer 40 is provided on layer 50, etching liquid is prevented from being brought into contcact with layer 20 even if layer 40 in the high convex part on substrate 100 is thin and etching liquid invades through a pin hole generated in layer 40 because the high convex part on substrate 100 is covered with layer 50. As a result, layer 20 only in part A is removed; and since layer 50 can be used as a part of the upper magnetic layer, the removal of layer 50 is not required.
COPYRIGHT: (C)1980,JPO&Japio
JP7817478A 1978-06-28 1978-06-28 Production of thin film magnetic head Pending JPS554762A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7817478A JPS554762A (en) 1978-06-28 1978-06-28 Production of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7817478A JPS554762A (en) 1978-06-28 1978-06-28 Production of thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS554762A true JPS554762A (en) 1980-01-14

Family

ID=13654582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7817478A Pending JPS554762A (en) 1978-06-28 1978-06-28 Production of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS554762A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2509503A1 (en) * 1981-07-13 1983-01-14 Memorex Corp METHOD FOR FORMING ALIGNED POLAR PIECES FOR MAGNETIC HEAD IN THIN SLABS
US4608293A (en) * 1982-07-27 1986-08-26 Sumitomo Special Metal Co., Ltd. Composite substrate for a thin-film magnetic head
US4804816A (en) * 1981-12-21 1989-02-14 Kabushiki Kaisha Kenwood Method of making a thin-film magnetic head having a multi-layered coil structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2509503A1 (en) * 1981-07-13 1983-01-14 Memorex Corp METHOD FOR FORMING ALIGNED POLAR PIECES FOR MAGNETIC HEAD IN THIN SLABS
US4804816A (en) * 1981-12-21 1989-02-14 Kabushiki Kaisha Kenwood Method of making a thin-film magnetic head having a multi-layered coil structure
US4608293A (en) * 1982-07-27 1986-08-26 Sumitomo Special Metal Co., Ltd. Composite substrate for a thin-film magnetic head

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