JPS5555235A - Electric capacity type pressure detector - Google Patents

Electric capacity type pressure detector

Info

Publication number
JPS5555235A
JPS5555235A JP12794578A JP12794578A JPS5555235A JP S5555235 A JPS5555235 A JP S5555235A JP 12794578 A JP12794578 A JP 12794578A JP 12794578 A JP12794578 A JP 12794578A JP S5555235 A JPS5555235 A JP S5555235A
Authority
JP
Japan
Prior art keywords
base plate
recess
electric capacity
diaphragm
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12794578A
Other languages
Japanese (ja)
Inventor
Minoru Oota
Etsuro Yasuda
Kimiaki Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP12794578A priority Critical patent/JPS5555235A/en
Publication of JPS5555235A publication Critical patent/JPS5555235A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To improve the quality of an electric capacity type pressure detector, by providing a recess on a base plate and prescribing electrode lead-out positions.
CONSTITUTION: A circular recess 10 is provided on one side of an electrically insulating circular base plate 2 except for its peripheral part. A first electrode 3 is circularly provided at the bottom 10a of the recess 10. A second electrode 4 is circularly provided on the bottom of on electrically insulating circular diaphragm 1. The diaphragm 1 is fixed with an electroconductive seal 5 on the base plate 2. The pressure of a reference pressure chamber 9 defined by the diaphragm 1 and the base plate 2 is reduced to a prescribed level through a penetrating hole 8c. The chamber 9 is then sealed up by a bonding agent 11. Lead members 7a, 7b are inserted into other penetrating holes 8a, 8b and connected to the first and the second electrodes 3, 4 directly or through the electroconductive seal 5. The distance between the electrodes 3, 4 depends on the depth of the recess 10. The distance does not fluctuate althought the thickness of the electroconductive seal 5 is not accurately controlled. This results in providing a high- quality detector in which the fluctuation in the electric capacity between the lead members 7a, 7b is little.
COPYRIGHT: (C)1980,JPO&Japio
JP12794578A 1978-10-18 1978-10-18 Electric capacity type pressure detector Pending JPS5555235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12794578A JPS5555235A (en) 1978-10-18 1978-10-18 Electric capacity type pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12794578A JPS5555235A (en) 1978-10-18 1978-10-18 Electric capacity type pressure detector

Publications (1)

Publication Number Publication Date
JPS5555235A true JPS5555235A (en) 1980-04-23

Family

ID=14972515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12794578A Pending JPS5555235A (en) 1978-10-18 1978-10-18 Electric capacity type pressure detector

Country Status (1)

Country Link
JP (1) JPS5555235A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866042U (en) * 1981-10-24 1983-05-04 株式会社土屋製作所 Lubricating oil supply device for press machines
JPS58210534A (en) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd Pressure detector
JPS59148842A (en) * 1983-02-15 1984-08-25 Matsushita Electric Ind Co Ltd Manufacture of electrostatic capacity-type pressure sensor
JPS60219528A (en) * 1984-03-30 1985-11-02 エルサグ・インターナショナル・ビー・ブイ Molten silica diaphragm module for high-temperature pressuretransducer
JPH03501063A (en) * 1989-04-01 1991-03-07 エンドレス　ウント　ハウザー　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング　ウント　コンパニー Capacitive pressure sensor and its manufacturing method
JP2003042875A (en) * 2001-07-26 2003-02-13 Kyocera Corp Package for pressure detector
JP2012154953A (en) * 2006-12-25 2012-08-16 Kyocera Corp Package for pressure sensor, its manufacturing method, and pressure sensor

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866042U (en) * 1981-10-24 1983-05-04 株式会社土屋製作所 Lubricating oil supply device for press machines
JPS58210534A (en) * 1982-06-01 1983-12-07 Citizen Watch Co Ltd Pressure detector
JPS59148842A (en) * 1983-02-15 1984-08-25 Matsushita Electric Ind Co Ltd Manufacture of electrostatic capacity-type pressure sensor
JPS60219528A (en) * 1984-03-30 1985-11-02 エルサグ・インターナショナル・ビー・ブイ Molten silica diaphragm module for high-temperature pressuretransducer
JPH03501063A (en) * 1989-04-01 1991-03-07 エンドレス　ウント　ハウザー　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング　ウント　コンパニー Capacitive pressure sensor and its manufacturing method
JP2003042875A (en) * 2001-07-26 2003-02-13 Kyocera Corp Package for pressure detector
JP2012154953A (en) * 2006-12-25 2012-08-16 Kyocera Corp Package for pressure sensor, its manufacturing method, and pressure sensor

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