JPS5560251A - Electrode checker - Google Patents

Abstract

PURPOSE: To make the work of check, operable in a short length of time and correctly, for whether arrangement of the electrodes is good or not, by means of making a comparison between detection signals or pick-up image in such manner with an electrode plate, to be checked, placed on one of the scanning base and the reference plate on another to throw a light to the respective electrode plate.

CONSTITUTION: On one scanner 2 of a plurality of scanner bases 1, 2, being shifted toward XY directions by a pulse motor 5, 6, is placed an electrode plate 4 to be checked, and on another scanner 1 is placed a reference electrode plate 3. With the above device controlled by a microprocessor, and a check point illuminated by the lighting source while two-dimensionally shifting the scanner bases 1, 2, a detection of image pick-up is operated by a line sensor 7 like CCD sensors. Though a good pattern electrode a becoming an output, as shown by the figure d in the drawing, a bad pattern b becoming one as in c, the both outputs are compared to detect a difference e, and the decision is made to be bad. And with a comparison made with the same picture element information obtained from the reference side, an off-positioning in the check side can be also corrected. In this way, the work of checking for whether arrangement of the electrode is good or not can be operated in a short length of time and correctly.

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