JPS5587431A - System for finding defect in repeated pattern - Google Patents
System for finding defect in repeated patternInfo
- Publication number
- JPS5587431A JPS5587431A JP16250078A JP16250078A JPS5587431A JP S5587431 A JPS5587431 A JP S5587431A JP 16250078 A JP16250078 A JP 16250078A JP 16250078 A JP16250078 A JP 16250078A JP S5587431 A JPS5587431 A JP S5587431A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- sensor
- patterns
- electrode
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE: To simply and certainly find a defect in repeat patterns by taking a picture, by means of a photoline sensor, of electrode patterns on a display panel to be examined while moving the electrode patterns in a direction in which they continue, so as to obtain a signal correspond to the sum of picture elements in every repeat cycle, and then comparing this signal with a reference signal.
CONSTITUTION: An electrode substrate 11 to be examined is placed on a longitudinally and transversely movable scan drive means 10, and a CCD photoline sensor 12 for taking a picture of electrode patterns is disposed above the electrode substrate 11. An A/D converter 15 for converting an analog image signal, which is input thereinto from the sensor 12, into a binary is provided, and an output of the A/D converter 15 is connected to a counter 17 through a section signal generator 16. A branch output of the converter 15 is connected to a data memory 20 through an address generator 19. In this structure, light is applied to the electrode substrate 11 so that high level signals and low-level signals are generated in the sensor 12 with respect to patterns A-X in space sections 4 between electrodes and electrode conductor sections 3, respectively. When a defect 6 exists, an abnormality signal is generated or the generation of an abnormality signal indicates the existence of a defect.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16250078A JPS5587431A (en) | 1978-12-26 | 1978-12-26 | System for finding defect in repeated pattern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16250078A JPS5587431A (en) | 1978-12-26 | 1978-12-26 | System for finding defect in repeated pattern |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5587431A true JPS5587431A (en) | 1980-07-02 |
Family
ID=15755793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16250078A Pending JPS5587431A (en) | 1978-12-26 | 1978-12-26 | System for finding defect in repeated pattern |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5587431A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62265512A (en) * | 1986-05-13 | 1987-11-18 | Dainippon Printing Co Ltd | Inspecting method for shadow mask |
| JPH01265368A (en) * | 1988-04-15 | 1989-10-23 | Matsushita Electric Ind Co Ltd | Inspection instrument for print pattern |
| US6081613A (en) * | 1994-08-24 | 2000-06-27 | Matsushita Electric Industrial Co., Ltd. | System for inspecting an appearance of a printed circuit board |
| US6445813B1 (en) | 1994-08-24 | 2002-09-03 | Matsushita Electric Industrial Co., Ltd. | System for inspecting an apparatus of a printed circuit board |
-
1978
- 1978-12-26 JP JP16250078A patent/JPS5587431A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62265512A (en) * | 1986-05-13 | 1987-11-18 | Dainippon Printing Co Ltd | Inspecting method for shadow mask |
| JPH01265368A (en) * | 1988-04-15 | 1989-10-23 | Matsushita Electric Ind Co Ltd | Inspection instrument for print pattern |
| US6081613A (en) * | 1994-08-24 | 2000-06-27 | Matsushita Electric Industrial Co., Ltd. | System for inspecting an appearance of a printed circuit board |
| US6445813B1 (en) | 1994-08-24 | 2002-09-03 | Matsushita Electric Industrial Co., Ltd. | System for inspecting an apparatus of a printed circuit board |
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