JPS556737A - Scan electron microscope - Google Patents

Scan electron microscope

Info

Publication number
JPS556737A
JPS556737A JP7966078A JP7966078A JPS556737A JP S556737 A JPS556737 A JP S556737A JP 7966078 A JP7966078 A JP 7966078A JP 7966078 A JP7966078 A JP 7966078A JP S556737 A JPS556737 A JP S556737A
Authority
JP
Japan
Prior art keywords
circuit
control electrode
electron gun
controls
secondary electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7966078A
Other languages
Japanese (ja)
Other versions
JPS6055951B2 (en
Inventor
Yoshihiro Hirata
Hiroshi Uchiumi
Yoichi Obara
Shigemasa Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP53079660A priority Critical patent/JPS6055951B2/en
Publication of JPS556737A publication Critical patent/JPS556737A/en
Publication of JPS6055951B2 publication Critical patent/JPS6055951B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To extend the optimum contrast area by relating both controls of the secondary electron control electrode and the electron gun power source.
CONSTITUTION: The electron gun power source 22 which changes the intensity of electron beam irradiated to a sample 4, secondary electron control electrode 14 which controls the quantity of electrons from the sample to the detector 8, contrast detecting circuit 16 which emits a signal for the image contrast by an output signal from the detector 8, and control circuit 15 which controls both the secondary electron control electrode and electron gun correlatedly in a proper range by an output of the detecting circuit 16 are provided. Also the detecting circuit consists of the upper limit sample hold circuit 17, lower limit sample hold circuit 18, subtraction circuit 19 which obtains the difference between both held signals, and comparator 21 which compares voltage of the reference power supply 20 with an output of the subtraction circuit. By this way, the optimum contrast can be obtained over an extremely wide area notwithstanding both the secondary electron control electrode and the electron gun power supply are used in the range of proper operation.
COPYRIGHT: (C)1980,JPO&Japio
JP53079660A 1978-06-30 1978-06-30 scanning electron microscope Expired JPS6055951B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53079660A JPS6055951B2 (en) 1978-06-30 1978-06-30 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53079660A JPS6055951B2 (en) 1978-06-30 1978-06-30 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS556737A true JPS556737A (en) 1980-01-18
JPS6055951B2 JPS6055951B2 (en) 1985-12-07

Family

ID=13696297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53079660A Expired JPS6055951B2 (en) 1978-06-30 1978-06-30 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS6055951B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182645A (en) * 1984-09-29 1986-04-26 Jeol Ltd X-ray microanalyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6182645A (en) * 1984-09-29 1986-04-26 Jeol Ltd X-ray microanalyzer

Also Published As

Publication number Publication date
JPS6055951B2 (en) 1985-12-07

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