JPS5574404A - Measuring device of object position - Google Patents

Measuring device of object position

Info

Publication number
JPS5574404A
JPS5574404A JP14827778A JP14827778A JPS5574404A JP S5574404 A JPS5574404 A JP S5574404A JP 14827778 A JP14827778 A JP 14827778A JP 14827778 A JP14827778 A JP 14827778A JP S5574404 A JPS5574404 A JP S5574404A
Authority
JP
Japan
Prior art keywords
light
laser beam
detected
measured
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14827778A
Other languages
Japanese (ja)
Other versions
JPS5840123B2 (en
Inventor
Akira Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14827778A priority Critical patent/JPS5840123B2/en
Publication of JPS5574404A publication Critical patent/JPS5574404A/en
Publication of JPS5840123B2 publication Critical patent/JPS5840123B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the position of object precisely when measured by laser light by compensating a change of the intensity of laser beam and the deflection of beam.
CONSTITUTION: When the tip end of object 16 to be measured is located at the center of laser beam 12a, a detection signal Ia proportional to the position of object can be obtained by the light quantity detector 17. When the light beam is displaced a minute angle, a measurement error is produced. The minute displacement of beam is detected by the beam deflection detector 19, the third laser beam 12c is detected by the light quantity detector for compensation 18, and a compensating operation is performed to dispaly the exact position of object on the indicator 24.
COPYRIGHT: (C)1980,JPO&Japio
JP14827778A 1978-11-30 1978-11-30 Object position measuring device Expired JPS5840123B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14827778A JPS5840123B2 (en) 1978-11-30 1978-11-30 Object position measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14827778A JPS5840123B2 (en) 1978-11-30 1978-11-30 Object position measuring device

Publications (2)

Publication Number Publication Date
JPS5574404A true JPS5574404A (en) 1980-06-05
JPS5840123B2 JPS5840123B2 (en) 1983-09-03

Family

ID=15449159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14827778A Expired JPS5840123B2 (en) 1978-11-30 1978-11-30 Object position measuring device

Country Status (1)

Country Link
JP (1) JPS5840123B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210505A (en) * 1982-06-01 1983-12-07 Nec Corp Laser optical device
CN103791845A (en) * 2014-01-21 2014-05-14 山西大学 Method and device for measuring small optical transverse displacement based on laser high-order transverse mode

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210505A (en) * 1982-06-01 1983-12-07 Nec Corp Laser optical device
CN103791845A (en) * 2014-01-21 2014-05-14 山西大学 Method and device for measuring small optical transverse displacement based on laser high-order transverse mode

Also Published As

Publication number Publication date
JPS5840123B2 (en) 1983-09-03

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