JPS5576558A - Astigmatism compensating and focusing device - Google Patents

Astigmatism compensating and focusing device

Info

Publication number
JPS5576558A
JPS5576558A JP15007478A JP15007478A JPS5576558A JP S5576558 A JPS5576558 A JP S5576558A JP 15007478 A JP15007478 A JP 15007478A JP 15007478 A JP15007478 A JP 15007478A JP S5576558 A JPS5576558 A JP S5576558A
Authority
JP
Japan
Prior art keywords
electron beam
astigmatism
waveform
signal waveform
focus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15007478A
Other languages
English (en)
Inventor
Kyoichi Miyauchi
Teiji Katsuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15007478A priority Critical patent/JPS5576558A/ja
Publication of JPS5576558A publication Critical patent/JPS5576558A/ja
Pending legal-status Critical Current

Links

JP15007478A 1978-12-06 1978-12-06 Astigmatism compensating and focusing device Pending JPS5576558A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15007478A JPS5576558A (en) 1978-12-06 1978-12-06 Astigmatism compensating and focusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15007478A JPS5576558A (en) 1978-12-06 1978-12-06 Astigmatism compensating and focusing device

Publications (1)

Publication Number Publication Date
JPS5576558A true JPS5576558A (en) 1980-06-09

Family

ID=15488944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15007478A Pending JPS5576558A (en) 1978-12-06 1978-12-06 Astigmatism compensating and focusing device

Country Status (1)

Country Link
JP (1) JPS5576558A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942750A (ja) * 1982-08-31 1984-03-09 Shimadzu Corp 荷電粒子ビ−ム走査型顕微鏡の焦点検出装置
JPWO2019186938A1 (ja) * 2018-03-29 2021-02-25 株式会社日立ハイテク 荷電粒子線装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942750A (ja) * 1982-08-31 1984-03-09 Shimadzu Corp 荷電粒子ビ−ム走査型顕微鏡の焦点検出装置
JPWO2019186938A1 (ja) * 2018-03-29 2021-02-25 株式会社日立ハイテク 荷電粒子線装置

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