JPS557880A - Etching solution for organic resin - Google Patents
Etching solution for organic resinInfo
- Publication number
- JPS557880A JPS557880A JP5151979A JP5151979A JPS557880A JP S557880 A JPS557880 A JP S557880A JP 5151979 A JP5151979 A JP 5151979A JP 5151979 A JP5151979 A JP 5151979A JP S557880 A JPS557880 A JP S557880A
- Authority
- JP
- Japan
- Prior art keywords
- etching solution
- organic resin
- guanidine
- polyamine
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 title abstract 4
- 239000011347 resin Substances 0.000 title 1
- 229920005989 resin Polymers 0.000 title 1
- ZRALSGWEFCBTJO-UHFFFAOYSA-N Guanidine Chemical compound NC(N)=N ZRALSGWEFCBTJO-UHFFFAOYSA-N 0.000 abstract 4
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 abstract 4
- CHJJGSNFBQVOTG-UHFFFAOYSA-N N-methyl-guanidine Natural products CNC(N)=N CHJJGSNFBQVOTG-UHFFFAOYSA-N 0.000 abstract 2
- SWSQBOPZIKWTGO-UHFFFAOYSA-N dimethylaminoamidine Natural products CN(C)C(N)=N SWSQBOPZIKWTGO-UHFFFAOYSA-N 0.000 abstract 2
- 229920000768 polyamine Polymers 0.000 abstract 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 abstract 1
- 229920001721 polyimide Polymers 0.000 abstract 1
- 239000009719 polyimide resin Substances 0.000 abstract 1
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
PURPOSE: Title etching solution that contains hydrazine, a polyamine and/or guanidine, thus being suitable for extremely fine processing.
CONSTITUTION: Said etching solution contains (A) hydrazine, (B) a polyamine of formula I (n is 3 or more integral number), such as ethylenediamine, and (C) guanidine of formula II.
USE: An etching solution for films of polyimide resin.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151979A JPS557880A (en) | 1979-04-27 | 1979-04-27 | Etching solution for organic resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151979A JPS557880A (en) | 1979-04-27 | 1979-04-27 | Etching solution for organic resin |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50098179A Division JPS5222071A (en) | 1974-08-23 | 1975-08-13 | Method of selective etching of film of polyamide resin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS557880A true JPS557880A (en) | 1980-01-21 |
Family
ID=12889250
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5151979A Pending JPS557880A (en) | 1979-04-27 | 1979-04-27 | Etching solution for organic resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS557880A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163707A (en) * | 1981-03-31 | 1982-10-08 | Yunitsuku:Kk | Multiple cylinder equipment |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5222071A (en) * | 1975-08-13 | 1977-02-19 | Hitachi Ltd | Method of selective etching of film of polyamide resin |
-
1979
- 1979-04-27 JP JP5151979A patent/JPS557880A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5222071A (en) * | 1975-08-13 | 1977-02-19 | Hitachi Ltd | Method of selective etching of film of polyamide resin |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57163707A (en) * | 1981-03-31 | 1982-10-08 | Yunitsuku:Kk | Multiple cylinder equipment |
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