JPS5580001A - Detecting method of uneven thickness of conductive thin film - Google Patents
Detecting method of uneven thickness of conductive thin filmInfo
- Publication number
- JPS5580001A JPS5580001A JP15264978A JP15264978A JPS5580001A JP S5580001 A JPS5580001 A JP S5580001A JP 15264978 A JP15264978 A JP 15264978A JP 15264978 A JP15264978 A JP 15264978A JP S5580001 A JPS5580001 A JP S5580001A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- conductive thin
- detecting
- change
- capacity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title abstract 8
- 238000006073 displacement reaction Methods 0.000 abstract 3
- 239000010408 film Substances 0.000 abstract 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
PURPOSE: To measure the unevenness of thin film thickness in its nondestructive state through a dielectric covered with conductive thin film by detecting the ratio of a change of the distance between the detecting electrode of the capacity displacement meter and the conductive thin film to a change of the corresponding output of the displacement meter.
CONSTITUTION: The capacity displacement meter 11 for measuring the unevenness of the conductive thin film thickness 3 of the rapid start fluorescent lamp 1 consists of the detecting head 12, fine adjustment 13 that moves the detecting head 12, and capacity detecting circuit 14. The detecting electrode 15 mounted on the detecting head 12 is made the other electrode opposite to the conductive thin film 3. When the detecting head is advanced to or retreated from the fluorescent lamp by the fine adjustment, electric capacity between the conductive thin film 3 and the detecting electrode 15 is changed, a voltage corresponding to the change is provided in the form of an electric signal from the capacity detecting circuit 14. The unevenness of thickness of the conductive thin film applied to the dielectric is measured by using the fact that the ratio of a change Δx of the distance to a change of the output Δv is corresponding to the thickness of film.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15264978A JPS5580001A (en) | 1978-12-12 | 1978-12-12 | Detecting method of uneven thickness of conductive thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15264978A JPS5580001A (en) | 1978-12-12 | 1978-12-12 | Detecting method of uneven thickness of conductive thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5580001A true JPS5580001A (en) | 1980-06-16 |
Family
ID=15545027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15264978A Pending JPS5580001A (en) | 1978-12-12 | 1978-12-12 | Detecting method of uneven thickness of conductive thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5580001A (en) |
-
1978
- 1978-12-12 JP JP15264978A patent/JPS5580001A/en active Pending
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