JPS5580030A - Pirani gauge - Google Patents

Pirani gauge

Info

Publication number
JPS5580030A
JPS5580030A JP15375578A JP15375578A JPS5580030A JP S5580030 A JPS5580030 A JP S5580030A JP 15375578 A JP15375578 A JP 15375578A JP 15375578 A JP15375578 A JP 15375578A JP S5580030 A JPS5580030 A JP S5580030A
Authority
JP
Japan
Prior art keywords
temperature
output voltage
output
change
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15375578A
Other languages
Japanese (ja)
Other versions
JPS5815050B2 (en
Inventor
Masahiro Sakamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Light Metal Industries Ltd
Original Assignee
Mitsubishi Light Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Light Metal Industries Ltd filed Critical Mitsubishi Light Metal Industries Ltd
Priority to JP15375578A priority Critical patent/JPS5815050B2/en
Publication of JPS5580030A publication Critical patent/JPS5580030A/en
Publication of JPS5815050B2 publication Critical patent/JPS5815050B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To improve the precision and to expand the measurable area by eliminating the influence of atmospheric temperature by providing a temperature compensating circuit that compensates the output variation caused by a change of the atmospheric temperature.
CONSTITUTION: A Pirani tube P is put in side of the Wheatstone bridge circuit, the resistance R's for measuring the output is connected to the bridge in series, and an output voltage is obtained from both terminals a, b of the resistance R's. The resistance R's is located near the Pirani tube P, its temperature coefficient is made equal to the gradient of the temperature change rate of the said output voltage, the thermoresistance Th, which is placed near the Pirani tube P, and the temperature compensating circuit that takes a portion of the output voltage, which is equivalent to the change of the open air temperature, and adds it to the output voltage are provided. In this way, an output from both the terminals a, b at a certain reference temperature is compensated with temperature to obtain an output voltage without an influence by a change of the atmospheric temperature.
COPYRIGHT: (C)1980,JPO&Japio
JP15375578A 1978-12-14 1978-12-14 pirani vacuum gauge Expired JPS5815050B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15375578A JPS5815050B2 (en) 1978-12-14 1978-12-14 pirani vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15375578A JPS5815050B2 (en) 1978-12-14 1978-12-14 pirani vacuum gauge

Publications (2)

Publication Number Publication Date
JPS5580030A true JPS5580030A (en) 1980-06-16
JPS5815050B2 JPS5815050B2 (en) 1983-03-23

Family

ID=15569407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15375578A Expired JPS5815050B2 (en) 1978-12-14 1978-12-14 pirani vacuum gauge

Country Status (1)

Country Link
JP (1) JPS5815050B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6474428A (en) * 1987-09-17 1989-03-20 Tokuda Seisakusho Pressure measuring instrument
JP2017508976A (en) * 2014-03-25 2017-03-30 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Micro Pirani vacuum gauge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6474428A (en) * 1987-09-17 1989-03-20 Tokuda Seisakusho Pressure measuring instrument
JP2017508976A (en) * 2014-03-25 2017-03-30 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Micro Pirani vacuum gauge

Also Published As

Publication number Publication date
JPS5815050B2 (en) 1983-03-23

Similar Documents

Publication Publication Date Title
ES2030171T3 (en) GAS CURRENT CORRECTION SENSOR.
EP0050135A4 (en) AMPLIFIER CIRCUIT FOR TEMPERATURE-COMPENSATED PRESSURE SENSOR.
JPS55112523A (en) Gas flow rate measuring unit
EP0150784A3 (en) Trimming method for a temperature sensor, and temperature sensor produced by this method
JPS5322385A (en) Diffusion type semiconductor pr essure receiving element
JPS5629122A (en) Measuring method of level in tank
JPS57192851A (en) Limiting current type oxygen concentration detector compensated for temperature of measured output
JPS5242167A (en) Semiconductor pressure gauge
JPS5552925A (en) Standard type pressure sensor
JPS57118677A (en) Semiconductor differential pressure sensor
JPS5587913A (en) Gas flow rate measuring device
SU574602A1 (en) Temperature-stabulized strain gauge
JPS57200817A (en) Device for measuring injection amount of injection pump
JPS57139631A (en) Thermocouple temperature measuring device
JPS5594122A (en) Thermometer
JPS5574412A (en) Pressure transducer
JPS5263083A (en) Silicon strain gauge
JPS52101097A (en) Gas sensor element
JPS5629120A (en) Flow measuring method
SU1642231A1 (en) Strain gauge bridge
JPS5565479A (en) Temperature compensation system for pressure transducer
JPS5425683A (en) Pressure transmitter of semiconductor
JPS5712332A (en) Temperature sensor
JPS53114687A (en) Strain measuring device of semiconductor
JPS57186135A (en) Semiconductor pressure transducer