JPS5582777A - Heating element for evaporation - Google Patents

Heating element for evaporation

Info

Publication number
JPS5582777A
JPS5582777A JP15479578A JP15479578A JPS5582777A JP S5582777 A JPS5582777 A JP S5582777A JP 15479578 A JP15479578 A JP 15479578A JP 15479578 A JP15479578 A JP 15479578A JP S5582777 A JPS5582777 A JP S5582777A
Authority
JP
Japan
Prior art keywords
heating element
metal
evaporation
diameter
twisting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15479578A
Other languages
Japanese (ja)
Inventor
Katsuji Ohashi
Osamu Yamazaki
Ryozo Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15479578A priority Critical patent/JPS5582777A/en
Publication of JPS5582777A publication Critical patent/JPS5582777A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve the durability, by forming heating element for evaporation by twisting together plural wire rods having 0.5-1mm of diameter in twisting pitch of a fixed length and making flowing diffusion of the metal to be evaporated uniform and then, carrying out a good evaporation. CONSTITUTION:The heating element formed by twisting together plural wire rods, such as tungsten etc., having 0.5-1mm of diameter, having the following characteristics, that is, maximum twisting pitch; 5mm, length; obtained in the extent of (2.5-8)X wire rod diameter. The metal to be melted is diffused flowing on the surface of the above heating element uniformly and a good metal coating is formed and also, a life of coil is able to prolong improving the durability by using the above heating element for that of melting and evaporating the metal to be evaporated, such as aluminum etc.
JP15479578A 1978-12-14 1978-12-14 Heating element for evaporation Pending JPS5582777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15479578A JPS5582777A (en) 1978-12-14 1978-12-14 Heating element for evaporation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15479578A JPS5582777A (en) 1978-12-14 1978-12-14 Heating element for evaporation

Publications (1)

Publication Number Publication Date
JPS5582777A true JPS5582777A (en) 1980-06-21

Family

ID=15592050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15479578A Pending JPS5582777A (en) 1978-12-14 1978-12-14 Heating element for evaporation

Country Status (1)

Country Link
JP (1) JPS5582777A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0186090U (en) * 1987-11-28 1989-06-07
EP0619689A1 (en) * 1993-04-09 1994-10-12 Quartz Tubing Inc. Heating coil structures

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0186090U (en) * 1987-11-28 1989-06-07
EP0619689A1 (en) * 1993-04-09 1994-10-12 Quartz Tubing Inc. Heating coil structures

Similar Documents

Publication Publication Date Title
ES8306079A1 (en) Method of producing a heat insulating material, use of this material in construction units, and construction unit produced by the use of the material.
JPS5582776A (en) Heating element for evaporation
JPS5568703A (en) Carbon fiber element antenna device
JPS5734632A (en) Direct heating type cathode structure
JPS5641361A (en) Small diameter steel tube having amticorrosive alloy melt-stuck plated coat on inner circumferential wall and its preparation
JPS5590431A (en) Preparation of single mode glass fiber
JPS56149741A (en) Quick motion type cathode
JPS55141536A (en) Manufacture of compound superconductor
JPS5420440A (en) Single ended sheath heater & its manufacturing method
JPS5576051A (en) Manufacturing apparatus for hot dipped wire of uniform section
JPS57205335A (en) Manufacture of metal coated optical fiber
DE853621C (en) High performance heat emitters, especially for drying and therapeutic applications
JPS5659423A (en) Manufacture of frame electrode
JPS5542485A (en) Manufacture of voice coil
JPS5214140A (en) Preparation method of the central electrode for the spark plug
JPS544830A (en) Preparation of low melting point metal plating wire
JPS6459728A (en) Manufacture of superconducting wire
JPS5598436A (en) Directly heated cathode structure and its manufacturing method
JPS56135947A (en) Highly heat-conductive radiating substrate
JPS5676341A (en) Electrode for electric discharge machining
JPS57132633A (en) Manufacturing method of impregnation type cathode
JPS563935A (en) Direct heating type cathode structure
JPS57196741A (en) Metal coating method for optical fiber with
JPS56118241A (en) Impregnated cathode structure and manufacture
JPS56103410A (en) Manufacture of coil