JPS5583843A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS5583843A
JPS5583843A JP15979978A JP15979978A JPS5583843A JP S5583843 A JPS5583843 A JP S5583843A JP 15979978 A JP15979978 A JP 15979978A JP 15979978 A JP15979978 A JP 15979978A JP S5583843 A JPS5583843 A JP S5583843A
Authority
JP
Japan
Prior art keywords
humidity sensor
pore rate
surface layer
hermetical structure
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15979978A
Other languages
Japanese (ja)
Inventor
Koji Nitta
Jiro Terada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15979978A priority Critical patent/JPS5583843A/en
Publication of JPS5583843A publication Critical patent/JPS5583843A/en
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To prevent degradation to improve reliability and sensitivity by giving a hermetical structure, where a pore rate is regulated for a part of the surface layer at least, in a humidity sensor having a porous metallic oxide layer where electrodes are given.
CONSTITUTION: A humidity sensor is constituted by providing electrode 102 in a humidity sensitive porcelain of a pore rate of 10W40% and an average pore diameter below 2μm and providing hermetical structure material 104 of a pore rate below 10% in a part of the surface layer including electrode 102 at least. In respect to hermetical structure material 104, low-melting point glass (melted at 500°C), epoxy resin, Pb Sn alloy solder, etc., are used.
COPYRIGHT: (C)1980,JPO&Japio
JP15979978A 1978-12-21 1978-12-21 Humidity sensor Pending JPS5583843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15979978A JPS5583843A (en) 1978-12-21 1978-12-21 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15979978A JPS5583843A (en) 1978-12-21 1978-12-21 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS5583843A true JPS5583843A (en) 1980-06-24

Family

ID=15701505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15979978A Pending JPS5583843A (en) 1978-12-21 1978-12-21 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS5583843A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153942U (en) * 1979-10-15 1981-11-17
JPS59183356A (en) * 1983-04-04 1984-10-18 Hitachi Ltd humidity sensor
JPS62291541A (en) * 1986-06-11 1987-12-18 Shimadzu Corp Humidity sensor and its manufacturing method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496200B1 (en) * 1968-07-30 1974-02-13
JPS52149397A (en) * 1976-06-08 1977-12-12 Matsushita Electric Ind Co Ltd Moisture sensing element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496200B1 (en) * 1968-07-30 1974-02-13
JPS52149397A (en) * 1976-06-08 1977-12-12 Matsushita Electric Ind Co Ltd Moisture sensing element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153942U (en) * 1979-10-15 1981-11-17
JPS59183356A (en) * 1983-04-04 1984-10-18 Hitachi Ltd humidity sensor
JPS62291541A (en) * 1986-06-11 1987-12-18 Shimadzu Corp Humidity sensor and its manufacturing method

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