JPS5583843A - Humidity sensor - Google Patents

Humidity sensor

Info

Publication number
JPS5583843A
JPS5583843A JP15979978A JP15979978A JPS5583843A JP S5583843 A JPS5583843 A JP S5583843A JP 15979978 A JP15979978 A JP 15979978A JP 15979978 A JP15979978 A JP 15979978A JP S5583843 A JPS5583843 A JP S5583843A
Authority
JP
Japan
Prior art keywords
humidity sensor
pore rate
surface layer
hermetical structure
providing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15979978A
Other languages
English (en)
Inventor
Koji Nitta
Jiro Terada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15979978A priority Critical patent/JPS5583843A/ja
Publication of JPS5583843A publication Critical patent/JPS5583843A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP15979978A 1978-12-21 1978-12-21 Humidity sensor Pending JPS5583843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15979978A JPS5583843A (en) 1978-12-21 1978-12-21 Humidity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15979978A JPS5583843A (en) 1978-12-21 1978-12-21 Humidity sensor

Publications (1)

Publication Number Publication Date
JPS5583843A true JPS5583843A (en) 1980-06-24

Family

ID=15701505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15979978A Pending JPS5583843A (en) 1978-12-21 1978-12-21 Humidity sensor

Country Status (1)

Country Link
JP (1) JPS5583843A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153942U (ja) * 1979-10-15 1981-11-17
JPS59183356A (ja) * 1983-04-04 1984-10-18 Hitachi Ltd 湿度センサ
JPS62291541A (ja) * 1986-06-11 1987-12-18 Shimadzu Corp 湿度センサおよびその製造法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496200B1 (ja) * 1968-07-30 1974-02-13
JPS52149397A (en) * 1976-06-08 1977-12-12 Matsushita Electric Ind Co Ltd Moisture sensing element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496200B1 (ja) * 1968-07-30 1974-02-13
JPS52149397A (en) * 1976-06-08 1977-12-12 Matsushita Electric Ind Co Ltd Moisture sensing element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56153942U (ja) * 1979-10-15 1981-11-17
JPS59183356A (ja) * 1983-04-04 1984-10-18 Hitachi Ltd 湿度センサ
JPS62291541A (ja) * 1986-06-11 1987-12-18 Shimadzu Corp 湿度センサおよびその製造法

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