JPS5583849A - Measuring method of melted ozone density - Google Patents

Measuring method of melted ozone density

Info

Publication number
JPS5583849A
JPS5583849A JP15685078A JP15685078A JPS5583849A JP S5583849 A JPS5583849 A JP S5583849A JP 15685078 A JP15685078 A JP 15685078A JP 15685078 A JP15685078 A JP 15685078A JP S5583849 A JPS5583849 A JP S5583849A
Authority
JP
Japan
Prior art keywords
melted
density
ozone
oxygen
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15685078A
Other languages
Japanese (ja)
Inventor
Masayoshi Okamoto
Tetsuya Katayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15685078A priority Critical patent/JPS5583849A/en
Publication of JPS5583849A publication Critical patent/JPS5583849A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Abstract

PURPOSE: To make it possible to measure the density of ozone melted in solution easily by adding a reduction-property material to generate oxygen after measurement of the melted oxygen density in melted ozone solution and measuring the melted oxygen density again.
CONSTITUTION: After measuring the melted oxygen density in solution, where ozone is melted, by a melted oxygen meter, etc., and a reduction-property material such as potassium iodide is added to this solution to generate oxygen from melted ozone dependently upon oxidation reduction reaction. After that, the melted oxygen density is measured similarly, and the melted ozone density is obtained on a basis of increment components of the melted oxygen density.
COPYRIGHT: (C)1980,JPO&Japio
JP15685078A 1978-12-21 1978-12-21 Measuring method of melted ozone density Pending JPS5583849A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15685078A JPS5583849A (en) 1978-12-21 1978-12-21 Measuring method of melted ozone density

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15685078A JPS5583849A (en) 1978-12-21 1978-12-21 Measuring method of melted ozone density

Publications (1)

Publication Number Publication Date
JPS5583849A true JPS5583849A (en) 1980-06-24

Family

ID=15636735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15685078A Pending JPS5583849A (en) 1978-12-21 1978-12-21 Measuring method of melted ozone density

Country Status (1)

Country Link
JP (1) JPS5583849A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017173218A (en) * 2016-03-25 2017-09-28 栗田工業株式会社 Method and apparatus for measuring oxidant concentration, and electronic material cleaning apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017173218A (en) * 2016-03-25 2017-09-28 栗田工業株式会社 Method and apparatus for measuring oxidant concentration, and electronic material cleaning apparatus
WO2017163456A1 (en) * 2016-03-25 2017-09-28 栗田工業株式会社 Method and device for measuring oxidant concentration, and electronic material cleaning device

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