JPS5585204A - Precision measuring device - Google Patents

Precision measuring device

Info

Publication number
JPS5585204A
JPS5585204A JP16235278A JP16235278A JPS5585204A JP S5585204 A JPS5585204 A JP S5585204A JP 16235278 A JP16235278 A JP 16235278A JP 16235278 A JP16235278 A JP 16235278A JP S5585204 A JPS5585204 A JP S5585204A
Authority
JP
Japan
Prior art keywords
vibration
stylus
amplitude
approached
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16235278A
Other languages
Japanese (ja)
Other versions
JPS5857681B2 (en
Inventor
Kiyoshi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inoue Japax Research Inc
Original Assignee
Inoue Japax Research Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inoue Japax Research Inc filed Critical Inoue Japax Research Inc
Priority to JP16235278A priority Critical patent/JPS5857681B2/en
Priority to US06/038,174 priority patent/US4294121A/en
Priority to EP79301031A priority patent/EP0006022B1/en
Priority to DE7979301031T priority patent/DE2965496D1/en
Publication of JPS5585204A publication Critical patent/JPS5585204A/en
Publication of JPS5857681B2 publication Critical patent/JPS5857681B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE: To improve the precision of measurement and to operate the device easily by detecting and discriminating a change of the vibration of probing stylus and by controlling the amplitude according to the access state of stylus in the device for measuring the length.
CONSTITUTION: The oscillator 4 is controlled by the detection control circuit 5 that detects a change of oscillation, power applied to the vibration 1 is made greater and the tip of the probing stylus is approached to the object while the amplitude of vibration is made greater. When the fact that the tip of stylus comes in contact with the object slightly is detected, the power is reduced and the stylus is approached to the object while the amplitude of vibration is lessened. This operation is continuously repeated. When the number of vibration and the amplitude become fixed values, the measurement is performed.
COPYRIGHT: (C)1980,JPO&Japio
JP16235278A 1978-06-06 1978-12-22 Precision measuring device Expired JPS5857681B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16235278A JPS5857681B2 (en) 1978-12-22 1978-12-22 Precision measuring device
US06/038,174 US4294121A (en) 1978-06-06 1979-05-11 Position measuring system
EP79301031A EP0006022B1 (en) 1978-06-06 1979-06-01 Solid surface detecting and measuring device and method
DE7979301031T DE2965496D1 (en) 1978-06-06 1979-06-01 Solid surface detecting and measuring device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16235278A JPS5857681B2 (en) 1978-12-22 1978-12-22 Precision measuring device

Publications (2)

Publication Number Publication Date
JPS5585204A true JPS5585204A (en) 1980-06-27
JPS5857681B2 JPS5857681B2 (en) 1983-12-21

Family

ID=15752924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16235278A Expired JPS5857681B2 (en) 1978-06-06 1978-12-22 Precision measuring device

Country Status (1)

Country Link
JP (1) JPS5857681B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6604295B2 (en) * 2000-03-14 2003-08-12 Mitutoyo Corporation Microscopic geometry measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6604295B2 (en) * 2000-03-14 2003-08-12 Mitutoyo Corporation Microscopic geometry measuring device

Also Published As

Publication number Publication date
JPS5857681B2 (en) 1983-12-21

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