JPS5586048A - Magnetron discharge device - Google Patents

Magnetron discharge device

Info

Publication number
JPS5586048A
JPS5586048A JP16034878A JP16034878A JPS5586048A JP S5586048 A JPS5586048 A JP S5586048A JP 16034878 A JP16034878 A JP 16034878A JP 16034878 A JP16034878 A JP 16034878A JP S5586048 A JPS5586048 A JP S5586048A
Authority
JP
Japan
Prior art keywords
anode
cathode
magnetron discharge
plate sections
central
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16034878A
Other languages
Japanese (ja)
Inventor
Katsuhiro Kageyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP16034878A priority Critical patent/JPS5586048A/en
Publication of JPS5586048A publication Critical patent/JPS5586048A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To stably keep a magnetron discharge in a magnetic-field which changes its direction and strength, and perform the magnetron discharge which will not be influenced by magnetic-field variation of discharge current.
CONSTITUTION: The anode 1 is thin and circular. The distance from its symmetical axis, i.e. the length in which its radius is minimized is some 0.5.mm. The cathode plate section 12 is located, inserting the anode 1. DC high voltage is applied between the electrode plate sections 12 and the anode 1 from the DC high voltage power supply 4. The central cathode is located at the center of the anode 1 in the same way as the central cathode 2a. The central electrode 11 is electrically insulated from the cathode plate sections 12. Negative voltage is applied to the cathode plate sections 12 from the DC power supply 9.
COPYRIGHT: (C)1980,JPO&Japio
JP16034878A 1978-12-23 1978-12-23 Magnetron discharge device Pending JPS5586048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16034878A JPS5586048A (en) 1978-12-23 1978-12-23 Magnetron discharge device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16034878A JPS5586048A (en) 1978-12-23 1978-12-23 Magnetron discharge device

Publications (1)

Publication Number Publication Date
JPS5586048A true JPS5586048A (en) 1980-06-28

Family

ID=15713032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16034878A Pending JPS5586048A (en) 1978-12-23 1978-12-23 Magnetron discharge device

Country Status (1)

Country Link
JP (1) JPS5586048A (en)

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