JPS64698A - Plasma x-ray source - Google Patents

Plasma x-ray source

Info

Publication number
JPS64698A
JPS64698A JP62154377A JP15437787A JPS64698A JP S64698 A JPS64698 A JP S64698A JP 62154377 A JP62154377 A JP 62154377A JP 15437787 A JP15437787 A JP 15437787A JP S64698 A JPS64698 A JP S64698A
Authority
JP
Japan
Prior art keywords
gap
dismounting
vacuum
mounting
free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62154377A
Other languages
Japanese (ja)
Other versions
JPH0719668B2 (en
JPH01698A (en
Inventor
Koji Suzuki
Hiroshi Arita
Shunji Tokuyama
Yukio Kurosawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62154377A priority Critical patent/JPH0719668B2/en
Publication of JPS64698A publication Critical patent/JPS64698A/en
Publication of JPH01698A publication Critical patent/JPH01698A/en
Publication of JPH0719668B2 publication Critical patent/JPH0719668B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To seek to promote low inductance and maintenance control facilitation by making a vacuum trigger gap free in mounting/dismounting and arranging an external conductor provided with an external terminal in the coaxial form with the vacuum gap.
CONSTITUTION: A vacuum trigger gap device 3, which forms plasma X-ray source along with a condenser 1, a discharge tube 2 for X-ray generation, etc., is constituted of a vacuum trigger gap 5 free in mounting/dismounting and an external conductor 4 equipped with external terminals 9, 9a coaxial with it. When a trigger electrode 8 for the terminal 9a and the gap 5 is applied with a pulse from a pulse power source 27, plasma occurs by the creeping discharge of an insulator 28 and electricity is discharged between opposed electrodes 6, 7 and applied to between high and low electrodes 24, 25 of the discharge tube 2 through a coaxial cable 19a and X-ray is generated. By having constituted this device 3 in the coaxial form, the inductance is reduced and since the gap 5 is free in mounting/dismounting, the maintenance control inclusive of the exchange operation becomes easy.
COPYRIGHT: (C)1989,JPO&Japio
JP62154377A 1987-06-23 1987-06-23 Plasma x-ray source Expired - Lifetime JPH0719668B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62154377A JPH0719668B2 (en) 1987-06-23 1987-06-23 Plasma x-ray source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62154377A JPH0719668B2 (en) 1987-06-23 1987-06-23 Plasma x-ray source

Publications (3)

Publication Number Publication Date
JPS64698A true JPS64698A (en) 1989-01-05
JPH01698A JPH01698A (en) 1989-01-05
JPH0719668B2 JPH0719668B2 (en) 1995-03-06

Family

ID=15582820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62154377A Expired - Lifetime JPH0719668B2 (en) 1987-06-23 1987-06-23 Plasma x-ray source

Country Status (1)

Country Link
JP (1) JPH0719668B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999029145A1 (en) * 1997-12-03 1999-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge
US6240163B1 (en) 1998-06-19 2001-05-29 Advanced Laser & Fusion Technology Radiation E.G. X-ray pulse generator mechanisms
US7526242B2 (en) 2005-09-16 2009-04-28 Ricoh Company, Limited Transferring apparatus and image forming apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999029145A1 (en) * 1997-12-03 1999-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge
US6240163B1 (en) 1998-06-19 2001-05-29 Advanced Laser & Fusion Technology Radiation E.G. X-ray pulse generator mechanisms
US7526242B2 (en) 2005-09-16 2009-04-28 Ricoh Company, Limited Transferring apparatus and image forming apparatus

Also Published As

Publication number Publication date
JPH0719668B2 (en) 1995-03-06

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