JPS5594501A - Magnetic float control device - Google Patents

Magnetic float control device

Info

Publication number
JPS5594501A
JPS5594501A JP270279A JP270279A JPS5594501A JP S5594501 A JPS5594501 A JP S5594501A JP 270279 A JP270279 A JP 270279A JP 270279 A JP270279 A JP 270279A JP S5594501 A JPS5594501 A JP S5594501A
Authority
JP
Japan
Prior art keywords
gap
circuit
amplifier
current
attraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP270279A
Other languages
Japanese (ja)
Inventor
Kazuyuki Oide
Hiroaki Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP270279A priority Critical patent/JPS5594501A/en
Publication of JPS5594501A publication Critical patent/JPS5594501A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Abstract

PURPOSE: To obtain an optimum gain by storing a characteristic curve between the electromagnet current and the magnetic attraction with setting the gap as a parameter and by deriving the magnetic attraction from the measured values of both the electromagnet current and the gap.
CONSTITUTION: An exciting current is fed to the floating magnet 5 through the operation amplifier 17 and DC amplifier 18 by the deviation between the gap reference voltage Gc and the detected value by the gap sensor 7. The detection signals of both the gap sensor 7 and the exciting current detector 20 are fed to the input information deciding circuit 21 that is incorporated in the control gain regulator 19, the circuit 21 decides the attraction corresponding to both the current and gap to make a data, and gives it to the data selecting circuit 22. The circuit 22 selects a data of the attraction stored in the memory 23, and gives it to the opertion amplifier 17 to form the automatic control circuit 51 by an operation gain corresponding to the load weight.
COPYRIGHT: (C)1980,JPO&Japio
JP270279A 1979-01-11 1979-01-11 Magnetic float control device Pending JPS5594501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP270279A JPS5594501A (en) 1979-01-11 1979-01-11 Magnetic float control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP270279A JPS5594501A (en) 1979-01-11 1979-01-11 Magnetic float control device

Publications (1)

Publication Number Publication Date
JPS5594501A true JPS5594501A (en) 1980-07-18

Family

ID=11536609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP270279A Pending JPS5594501A (en) 1979-01-11 1979-01-11 Magnetic float control device

Country Status (1)

Country Link
JP (1) JPS5594501A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627303A (en) * 1985-07-03 1987-01-14 Toshiba Corp Levitating conveying apparatus
JPS62160004A (en) * 1986-01-06 1987-07-16 Hitachi Kiden Kogyo Ltd Magnetic levitation transport device
JPH02206306A (en) * 1989-02-02 1990-08-16 Tsubakimoto Chain Co Linear motor type conveyor apparatus
WO1994001354A1 (en) * 1992-07-07 1994-01-20 Ebara Corporation Magnetically levitated carrying apparatus
KR100878490B1 (en) * 2007-03-28 2009-01-13 현대로템 주식회사 Automatic calibration method of sensor signal input terminal of magnetic levitation controller
WO2016162288A1 (en) * 2015-04-09 2016-10-13 Mecatronix Ag Device for holding, positioning, and moving an object
JP2021068797A (en) * 2019-10-23 2021-04-30 株式会社アルバック Transport device and vacuum processing device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627303A (en) * 1985-07-03 1987-01-14 Toshiba Corp Levitating conveying apparatus
JPS62160004A (en) * 1986-01-06 1987-07-16 Hitachi Kiden Kogyo Ltd Magnetic levitation transport device
JPH02206306A (en) * 1989-02-02 1990-08-16 Tsubakimoto Chain Co Linear motor type conveyor apparatus
WO1994001354A1 (en) * 1992-07-07 1994-01-20 Ebara Corporation Magnetically levitated carrying apparatus
KR100878490B1 (en) * 2007-03-28 2009-01-13 현대로템 주식회사 Automatic calibration method of sensor signal input terminal of magnetic levitation controller
WO2016162288A1 (en) * 2015-04-09 2016-10-13 Mecatronix Ag Device for holding, positioning, and moving an object
CN107567654A (en) * 2015-04-09 2018-01-09 应用材料公司 Device for holding, positioning and mobile object
CN107567654B (en) * 2015-04-09 2020-11-06 应用材料公司 Devices for holding, positioning and moving objects
JP2021068797A (en) * 2019-10-23 2021-04-30 株式会社アルバック Transport device and vacuum processing device

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