JPS5594501A - Magnetic float control device - Google Patents

Magnetic float control device

Info

Publication number
JPS5594501A
JPS5594501A JP270279A JP270279A JPS5594501A JP S5594501 A JPS5594501 A JP S5594501A JP 270279 A JP270279 A JP 270279A JP 270279 A JP270279 A JP 270279A JP S5594501 A JPS5594501 A JP S5594501A
Authority
JP
Japan
Prior art keywords
gap
circuit
amplifier
current
attraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP270279A
Other languages
English (en)
Inventor
Kazuyuki Oide
Hiroaki Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP270279A priority Critical patent/JPS5594501A/ja
Publication of JPS5594501A publication Critical patent/JPS5594501A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP270279A 1979-01-11 1979-01-11 Magnetic float control device Pending JPS5594501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP270279A JPS5594501A (en) 1979-01-11 1979-01-11 Magnetic float control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP270279A JPS5594501A (en) 1979-01-11 1979-01-11 Magnetic float control device

Publications (1)

Publication Number Publication Date
JPS5594501A true JPS5594501A (en) 1980-07-18

Family

ID=11536609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP270279A Pending JPS5594501A (en) 1979-01-11 1979-01-11 Magnetic float control device

Country Status (1)

Country Link
JP (1) JPS5594501A (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627303A (ja) * 1985-07-03 1987-01-14 Toshiba Corp 浮上式搬送装置
JPS62160004A (ja) * 1986-01-06 1987-07-16 Hitachi Kiden Kogyo Ltd 磁気浮上搬送装置
JPH02206306A (ja) * 1989-02-02 1990-08-16 Tsubakimoto Chain Co リニアモータ式搬送装置
WO1994001354A1 (fr) * 1992-07-07 1994-01-20 Ebara Corporation Dispositif de transport en levitation magnetique
KR100878490B1 (ko) * 2007-03-28 2009-01-13 현대로템 주식회사 자기부상제어기의 센서신호 입력단 자동교정방법
WO2016162288A1 (de) * 2015-04-09 2016-10-13 Mecatronix Ag Vorrichtung zum halten, positionieren und bewegen eines objekts
JP2021068797A (ja) * 2019-10-23 2021-04-30 株式会社アルバック 搬送装置、および、真空処理装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627303A (ja) * 1985-07-03 1987-01-14 Toshiba Corp 浮上式搬送装置
JPS62160004A (ja) * 1986-01-06 1987-07-16 Hitachi Kiden Kogyo Ltd 磁気浮上搬送装置
JPH02206306A (ja) * 1989-02-02 1990-08-16 Tsubakimoto Chain Co リニアモータ式搬送装置
WO1994001354A1 (fr) * 1992-07-07 1994-01-20 Ebara Corporation Dispositif de transport en levitation magnetique
KR100878490B1 (ko) * 2007-03-28 2009-01-13 현대로템 주식회사 자기부상제어기의 센서신호 입력단 자동교정방법
WO2016162288A1 (de) * 2015-04-09 2016-10-13 Mecatronix Ag Vorrichtung zum halten, positionieren und bewegen eines objekts
CN107567654A (zh) * 2015-04-09 2018-01-09 应用材料公司 用于托持、定位和移动物体的装置
CN107567654B (zh) * 2015-04-09 2020-11-06 应用材料公司 用于托持、定位和移动物体的装置
JP2021068797A (ja) * 2019-10-23 2021-04-30 株式会社アルバック 搬送装置、および、真空処理装置

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