JPS559472A - Method of forming manganage oxide film - Google Patents

Method of forming manganage oxide film

Info

Publication number
JPS559472A
JPS559472A JP8277278A JP8277278A JPS559472A JP S559472 A JPS559472 A JP S559472A JP 8277278 A JP8277278 A JP 8277278A JP 8277278 A JP8277278 A JP 8277278A JP S559472 A JPS559472 A JP S559472A
Authority
JP
Japan
Prior art keywords
manganage
forming
oxide film
oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8277278A
Other languages
Japanese (ja)
Inventor
Toshirou Sasamoto
Yoshiaki Sanada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8277278A priority Critical patent/JPS559472A/en
Publication of JPS559472A publication Critical patent/JPS559472A/en
Pending legal-status Critical Current

Links

JP8277278A 1978-07-06 1978-07-06 Method of forming manganage oxide film Pending JPS559472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8277278A JPS559472A (en) 1978-07-06 1978-07-06 Method of forming manganage oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8277278A JPS559472A (en) 1978-07-06 1978-07-06 Method of forming manganage oxide film

Publications (1)

Publication Number Publication Date
JPS559472A true JPS559472A (en) 1980-01-23

Family

ID=13783717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8277278A Pending JPS559472A (en) 1978-07-06 1978-07-06 Method of forming manganage oxide film

Country Status (1)

Country Link
JP (1) JPS559472A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262529A (en) * 1985-09-12 1987-03-19 Toppan Printing Co Ltd Forming method for silicon nitride film
JPH06124858A (en) * 1992-10-13 1994-05-06 Matsushita Electric Ind Co Ltd Capacitor and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6262529A (en) * 1985-09-12 1987-03-19 Toppan Printing Co Ltd Forming method for silicon nitride film
JPH06124858A (en) * 1992-10-13 1994-05-06 Matsushita Electric Ind Co Ltd Capacitor and manufacturing method thereof

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