JPS52122084A - Inspection system for semiconductor substrates - Google Patents

Inspection system for semiconductor substrates

Info

Publication number
JPS52122084A
JPS52122084A JP3848976A JP3848976A JPS52122084A JP S52122084 A JPS52122084 A JP S52122084A JP 3848976 A JP3848976 A JP 3848976A JP 3848976 A JP3848976 A JP 3848976A JP S52122084 A JPS52122084 A JP S52122084A
Authority
JP
Japan
Prior art keywords
inspection system
semiconductor substrates
multistylus
probers
prober
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3848976A
Other languages
Japanese (ja)
Inventor
Masanori Aoki
Takao Karisasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3848976A priority Critical patent/JPS52122084A/en
Publication of JPS52122084A publication Critical patent/JPS52122084A/en
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To perform electrical checking between desired pads by providing plural multistylus probers and their postioning device and setting prober combination positions.
COPYRIGHT: (C)1977,JPO&Japio
JP3848976A 1976-04-06 1976-04-06 Inspection system for semiconductor substrates Pending JPS52122084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3848976A JPS52122084A (en) 1976-04-06 1976-04-06 Inspection system for semiconductor substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3848976A JPS52122084A (en) 1976-04-06 1976-04-06 Inspection system for semiconductor substrates

Publications (1)

Publication Number Publication Date
JPS52122084A true JPS52122084A (en) 1977-10-13

Family

ID=12526662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3848976A Pending JPS52122084A (en) 1976-04-06 1976-04-06 Inspection system for semiconductor substrates

Country Status (1)

Country Link
JP (1) JPS52122084A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138257U (en) * 1976-04-15 1977-10-20
JPH01143983A (en) * 1987-11-30 1989-06-06 Teru Kyushu Kk Probe device
US6306197B1 (en) 2000-04-19 2001-10-23 Seh America, Inc. Isopropyl alcohol scrubbing system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138257U (en) * 1976-04-15 1977-10-20
JPH01143983A (en) * 1987-11-30 1989-06-06 Teru Kyushu Kk Probe device
US6306197B1 (en) 2000-04-19 2001-10-23 Seh America, Inc. Isopropyl alcohol scrubbing system

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