JPS56100413A - Injecting method for ion - Google Patents

Injecting method for ion

Info

Publication number
JPS56100413A
JPS56100413A JP386380A JP386380A JPS56100413A JP S56100413 A JPS56100413 A JP S56100413A JP 386380 A JP386380 A JP 386380A JP 386380 A JP386380 A JP 386380A JP S56100413 A JPS56100413 A JP S56100413A
Authority
JP
Japan
Prior art keywords
mask
ions
injection
substrate
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP386380A
Other languages
English (en)
Inventor
Kazuhiko Tsuji
Takashi Hirao
Shigetoshi Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP386380A priority Critical patent/JPS56100413A/ja
Publication of JPS56100413A publication Critical patent/JPS56100413A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P30/00—Ion implantation into wafers, substrates or parts of devices
    • H10P30/20—Ion implantation into wafers, substrates or parts of devices into semiconductor materials, e.g. for doping

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP386380A 1980-01-16 1980-01-16 Injecting method for ion Pending JPS56100413A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP386380A JPS56100413A (en) 1980-01-16 1980-01-16 Injecting method for ion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP386380A JPS56100413A (en) 1980-01-16 1980-01-16 Injecting method for ion

Publications (1)

Publication Number Publication Date
JPS56100413A true JPS56100413A (en) 1981-08-12

Family

ID=11569029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP386380A Pending JPS56100413A (en) 1980-01-16 1980-01-16 Injecting method for ion

Country Status (1)

Country Link
JP (1) JPS56100413A (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521634A (en) * 1975-06-24 1977-01-07 Nippon Furnace Kogyo Kaisha Ltd Valve for fuel supply pipe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521634A (en) * 1975-06-24 1977-01-07 Nippon Furnace Kogyo Kaisha Ltd Valve for fuel supply pipe

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