JPS56110043A - Detecting method for humidity and reducing gas and complex detecting sensor thereof - Google Patents

Detecting method for humidity and reducing gas and complex detecting sensor thereof

Info

Publication number
JPS56110043A
JPS56110043A JP1288980A JP1288980A JPS56110043A JP S56110043 A JPS56110043 A JP S56110043A JP 1288980 A JP1288980 A JP 1288980A JP 1288980 A JP1288980 A JP 1288980A JP S56110043 A JPS56110043 A JP S56110043A
Authority
JP
Japan
Prior art keywords
humidity
reducing gas
detection
semiconductor
complex
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1288980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS632055B2 (fr
Inventor
Jiro Terada
Koji Nitta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1288980A priority Critical patent/JPS56110043A/ja
Priority to US06/229,181 priority patent/US4378691A/en
Priority to DE8181100655T priority patent/DE3171960D1/de
Priority to EP81100655A priority patent/EP0033521B1/fr
Priority to CA000369954A priority patent/CA1156064A/fr
Publication of JPS56110043A publication Critical patent/JPS56110043A/ja
Publication of JPS632055B2 publication Critical patent/JPS632055B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)
JP1288980A 1980-02-04 1980-02-04 Detecting method for humidity and reducing gas and complex detecting sensor thereof Granted JPS56110043A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1288980A JPS56110043A (en) 1980-02-04 1980-02-04 Detecting method for humidity and reducing gas and complex detecting sensor thereof
US06/229,181 US4378691A (en) 1980-02-04 1981-01-28 Multi-functional sensor
DE8181100655T DE3171960D1 (en) 1980-02-04 1981-01-29 Multi-functional sensor
EP81100655A EP0033521B1 (fr) 1980-02-04 1981-01-29 Sonde multifonctionnelle
CA000369954A CA1156064A (fr) 1980-02-04 1981-02-03 Sonde polyvalente

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1288980A JPS56110043A (en) 1980-02-04 1980-02-04 Detecting method for humidity and reducing gas and complex detecting sensor thereof

Publications (2)

Publication Number Publication Date
JPS56110043A true JPS56110043A (en) 1981-09-01
JPS632055B2 JPS632055B2 (fr) 1988-01-16

Family

ID=11817958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1288980A Granted JPS56110043A (en) 1980-02-04 1980-02-04 Detecting method for humidity and reducing gas and complex detecting sensor thereof

Country Status (1)

Country Link
JP (1) JPS56110043A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101127378B1 (ko) * 2000-10-16 2012-03-30 이 아이 듀폰 디 네모아 앤드 캄파니 가스의 혼합물을 분석하는 방법 및 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940491A (fr) * 1972-08-19 1974-04-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940491A (fr) * 1972-08-19 1974-04-16

Also Published As

Publication number Publication date
JPS632055B2 (fr) 1988-01-16

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