JPS56128557A - Mass spectrograph - Google Patents

Mass spectrograph

Info

Publication number
JPS56128557A
JPS56128557A JP3104280A JP3104280A JPS56128557A JP S56128557 A JPS56128557 A JP S56128557A JP 3104280 A JP3104280 A JP 3104280A JP 3104280 A JP3104280 A JP 3104280A JP S56128557 A JPS56128557 A JP S56128557A
Authority
JP
Japan
Prior art keywords
duplex
electrodes
ion
field
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3104280A
Other languages
Japanese (ja)
Inventor
Munehiro Naitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3104280A priority Critical patent/JPS56128557A/en
Publication of JPS56128557A publication Critical patent/JPS56128557A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/28—Static spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To cancel dispersion of energy and increase dispersion of mass, by connecting in series a diverging duplex field and focusing duplex field in arrangement with one of them to a positive magnetic field type and the other to diamagnetic field type. CONSTITUTION:The first diverging duplex field by a magnet 1 and electrodes 2, 3 and the second focusing duplex field by the magnet 1 and electrodes 5, 6 are constituted. The two duplex fields are connected in series in such a manner that direction of rotation of an ion is reversely arranged. To between the electrodes 2, 3 and between 5, 6 voltages are applied respectively from variable electrodes 7, 8 then a sweeping action of said voltage on the basis of a sweep signal from a sweep circuit 9 performs sweeping operation of mass quantity of an ion passing through the first and second duplex fields and incident upon a collector C. Of the two duplex fields, one is arranged to a positive magnetic field type, where force in the magnetic field acts in a direction toward the rotary center of an ion, and the other to a diamagnetic field type where force in the magnetic field acts in a direction separating from the rotary center of the ion.
JP3104280A 1980-03-12 1980-03-12 Mass spectrograph Pending JPS56128557A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3104280A JPS56128557A (en) 1980-03-12 1980-03-12 Mass spectrograph

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3104280A JPS56128557A (en) 1980-03-12 1980-03-12 Mass spectrograph

Publications (1)

Publication Number Publication Date
JPS56128557A true JPS56128557A (en) 1981-10-08

Family

ID=12320421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3104280A Pending JPS56128557A (en) 1980-03-12 1980-03-12 Mass spectrograph

Country Status (1)

Country Link
JP (1) JPS56128557A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023154072A (en) * 2015-02-10 2023-10-18 ノヴァ メジャリング インスツルメンツ インコーポレイテッド Systems and methods for semiconductor measurement and surface analysis using secondary ion mass spectrometry

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023154072A (en) * 2015-02-10 2023-10-18 ノヴァ メジャリング インスツルメンツ インコーポレイテッド Systems and methods for semiconductor measurement and surface analysis using secondary ion mass spectrometry

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